‘Blinking bubble’ micropump with microfabricated heaters

A micropump based on the periodic growth and collapse of a single vapor bubble in a microchannel is described. The bubble is generated by a vacuum-deposited platinum heater on a quartz chip. The pump is formed by bonding to the chip an acrylic cover with input and output ports in which a 125 µm channel is machined. Pumping rates on the order of 10 µl min−1 were obtained. In the absence of a complete theory for the device, the data are interpreted and rationalized on the basis of simple physical arguments. In particular, optimal performance conditions are derived. The micropump described here is simple in concept and realization and robust, as it does not have mechanical moving parts. A bi-directional pump can easily be built by providing two heaters.

[1]  G. Whitesides,et al.  Soft lithography in biology and biochemistry. , 2001, Annual review of biomedical engineering.

[2]  Robin H. Liu,et al.  Self-contained, fully integrated biochip for sample preparation, polymerase chain reaction amplification, and DNA microarray detection. , 2004, Analytical chemistry.

[3]  Andrea Prosperetti,et al.  Growth and collapse of a vapor bubble in a narrow tube , 2000 .

[4]  Susan Z. Hua,et al.  An electrolytically actuated micropump , 2004 .

[5]  Liwei Lin,et al.  A thermal-bubble-actuated micronozzle-diffuser pump , 2002 .

[6]  Frederick Sachs,et al.  Microfluidic actuation using electrochemically generated bubbles. , 2002, Analytical chemistry.

[7]  A. Yamazaki,et al.  Fabrication of micropump with spiral-type magnetic micro-machine , 2003, Digest of INTERMAG 2003. International Magnetics Conference (Cat. No.03CH37401).

[8]  J. Santiago,et al.  A laser induced cavitation pump , 2004 .

[9]  D. Liepmann,et al.  Fabrication and performance testing of a steady thermocapillary pump with no moving parts , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[10]  Andrea Prosperetti,et al.  Growth and collapse of a vapor bubble in a small tube , 1999 .

[11]  Mehmet Toner,et al.  A microbubble-powered bioparticle actuator , 2003 .

[12]  Juan G. Santiago,et al.  A review of micropumps , 2004 .

[13]  Nam-Trung Nguyen,et al.  MEMS-Micropumps: A Review , 2002 .

[14]  D. Beebe,et al.  Physics and applications of microfluidics in biology. , 2002, Annual review of biomedical engineering.

[15]  O. Jeong,et al.  A phase-change type micropump with aluminum flap valves , 2003 .

[16]  Jungho Kim,et al.  Heat Transfer Behavior on Small Horizontal Heaters During Pool Boiling of FC-72 , 1999 .

[17]  Chang-JinCJ Kim,et al.  Valveless pumping using traversing vapor bubbles in microchannels , 1998 .

[18]  A. Pisano,et al.  Characterization of a Micro-Mixing, Pumping, and Valving System , 2001 .

[19]  H. Lintel,et al.  A piezoelectric micropump based on micromachining of silicon , 1988 .

[20]  Andrea Prosperetti,et al.  A microfluidic ‘blinking bubble’ pump , 2005 .

[21]  Jan Lichtenberg,et al.  Sample pretreatment on microfabricated devices. , 2002, Talanta.

[22]  Andrea Prosperetti,et al.  The pumping effect of growing and collapsing bubbles in a tube. , 1999 .