SP12T RF MEMS 스위치에 관한 연구

This paper present a single-pole twelve-throw (SP12T) RF MEMS switch. The proposed SP12T switch consists of one single-pole double-throw (SPDT) switch and two single-pole six-throw (SP6T) switches. The SPDT switch was used to separate two SP6T switches and minimize a loss by the open stub effect caused by multi-path fading. The SP6T switch was based on an arrangement of six single-pole single-throw (SPST) switches. The SP12T RF MEMS switch was driven by a double stop (DS) comb drive, with a lateral resistive contact, and composed of single crystalline silicon (SCS) on glass.