Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc

Abstract Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp 3 /sp 2 bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp 3 fraction.

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