3D structuration of LTCC / thick-film sensors and fluidic devices

Thick-film and LTCC (Low Temperature Cofired Ceramic) technologies are now recognised as valid platforms for the fabrication of novel devices at the mesoscale for sensor, actuator, fluidic, electrical and packaging applications. In these fields, they allow the fabrication of sensitive, yet robust and cost effective devices. This work reviews and comments the different available structuration techniques, with an emphasis on sensor technology and on structuration methods based on sacrificial layers. This is exemplified through various sensors and related devices developed at our laboratory and elsewhere. Processing conditions are also discussed, with the aim of obtaining useful and reproducible sacrificial materials. Key words: sensors, thick-film, LTCC, 3D structuration, sacrificial layers, processing.

[1]  Peter Gründler,et al.  Temperature pulse voltammetry: hot layer electrodes made by LTCC technology , 1999 .

[2]  T. Maeder,et al.  Design and processing of low-range piezoresistive LTCC force sensors , 2005 .

[3]  Peter Ryser,et al.  3-D structuration of LTCC for Sensor Micro-fluidic Applications , 2004 .

[4]  Jenny M. Jones,et al.  A study of the reaction of oxygen with graphite: model chemistry. , 2001, Faraday discussions.

[5]  Development of a novel microreactor-based calorimeter for the study of fast exothermal reactions in liquid phase , 2004 .

[6]  Andreas Roosen,et al.  New lamination technique to join ceramic green tapes for the manufacturing of multilayer devices , 2001 .

[7]  Murat Okandan,et al.  Novel Microsystem Applications with New Techniques in Low‐Temperature Co‐Fired Ceramics , 2005 .

[8]  Peter Ryser,et al.  Influence of Lamination Parameters on LTCC Shrinkage under Unconstrained Sintering , 2006 .

[9]  T. Maeder,et al.  A microreactor-based system for the study of fast exothermic reactions in liquid phase: characterization of the system , 2004 .

[10]  Torsten Thelemann,et al.  Using LTCC for microsystems , 2002 .

[11]  J. Josserand,et al.  Mixing processes in a zigzag microchannel: finite element simulations and optical study. , 2002, Analytical chemistry.

[12]  Peter Ryser,et al.  Application of graphite-based sacrificial layers for fabrication of LTCC (low temperature co-fired ceramic) membranes and micro-channels , 2006 .

[13]  Giancarlo Corradini,et al.  LTCC thermal gas viscometer – heater module , 2006 .

[14]  T. Maeder,et al.  High-strength ceramic substrates for thick-film sensor applications , 2003 .

[15]  W. Bennett,et al.  Laminated Ceramic Microfluidic Components for Microreactor Applications , 2000 .