Influence of process parameters on the crystallinity, morphology and composition of tungsten oxide-based thin films grown by metalorganic chemical vapor deposition
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A. Ludwig | A. Devi | R. Fischer | H. Becker | T. Arcos | J. Winter | D. Rogalla | A. Birkner | A. Milanov | Stefan Cwik | H. Parala | T. Wagner | Vanessa Gwildies | R. Fischer
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