Mechanical displacement multiplier: 250 μM stable travel range MEMS actuator using frictionless simple compliant structures

The paper reports a novel MEMS actuator based on mechanical displacement multiplication to achieve a longer travel range MEMS actuator. This architecture employs neither hinges nor gears; but only simple compliant structures. Measurements show displacement reaching up to 250 μm with multiplication factor of 5. This architecture is designed to operate in one direction (Push) although it can be modified to operate in double direction (Push-Pull); accordingly the travel range can be doubled. One order of magnitude multiplication in displacement can be achieved by simple parameters modification and sacrificing die size; using such a new architecture can result in displacement beyond 1 mm while preserving the high yield and productivity. The actuator is realized on an SOI wafer with device thickness 90 μm using DRIE.