Micro gripper driven by SDAs coupled to an amplification mechanism

This paper presents a microgripper actuated by a train of 16 scratch drive actuators coupled to an amplification mechanism. The gripper mechanism design, the principle of the amplification mechanism and the fabrication process requiring four levels of polysilicon are presented. Moreover, the gripper mechanism has been modeled by finite elements method, using CASTEM 2000/sup /spl trade//. Then, the amplification ratio of displacement, the critical buckling load and the force applied to the grasped object are determined. The experiment parameters such as actuation voltage and excitation frequency are given. Finally, based on video observations, kinematics characterization is performed.

[1]  M. A. Northrup,et al.  Thin Film Shape Memory Alloy Microactuators , 1996, Microelectromechanical Systems (MEMS).

[2]  E. Makino,et al.  Thin Film Shape Memory Alloy Microactuators , 2001 .

[3]  Hiroyuki Fujita,et al.  Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS , 1997 .

[4]  Maria Chiara Carrozza,et al.  The development of a LIGA-microfabricated gripper for micromanipulation tasks , 1998 .

[5]  I. Shimoyama,et al.  Three dimensional SMA microelectrodes with clipping structure for insect neural recording , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[6]  Dominique Collard,et al.  Stiction-controlled locking system for three-dimensional self-assembled microstructures: theory and experimental validation , 2001, Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS.