Simulation of an Electrostatically Driven MEMS Fuel Pump

This paper presents results of an alytical and numerical simulations of an electrostatically actuated micro -scale fuel pump. The pump’s displaced volume and net flow rate are directly coupled, with larger diaphragm deflections producing greater flow rates. A consequence of large deflecti ons is that the diaphragm’s load -deflection relationship becomes nonlinear. When coupled to the inherently nonlinear fluid behavior, a complex problem ensues. Numerical methods are used to solve for the fluid –structure interaction and the large deflection of the pump diaphragm. The critical parameters examined in this study include chamber volume, actuation frequency and diaphragm thickness, as well as their effect on actuation voltage, net volumetric flow rate, and fluid pressure.

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