Modelling and Simulation of a Pneumatically Actuated Micropump

Performances of a pneumatically actuated micropump are described. Simulation results combined to an analytical model are used to optimize the micropump design in order to obtain a working frequency of 10 Hz for pneumatic pressure varying between 0.1-6 bar. A pneumatic chamber is placed between a polymer membrane to be actuated, and microchannels connected to a vacuum system. Time for pressurizing cycle and vacuum cycle as function of design parameters and relative pressure are calculated.