Microtechnologies for microscaled robots and components
暂无分享,去创建一个
[1] M. Esashi,et al. Silicon resonant angular rate sensor using electromagnetic excitation and capacitive detection , 1995 .
[2] M. Mehregany,et al. A simple fabrication process for polysilicon side-drive micromotors , 1994 .
[3] N. Iwatsuki,et al. Development of in-pipe operation micro robots , 1994, 1994 5th International Symposium on Micro Machine and Human Science Proceedings.
[4] K. Suzumori,et al. The development of an in-pipe microrobot applying the motion of an earthworm , 1994, 1994 5th International Symposium on Micro Machine and Human Science Proceedings.
[5] Wolfgang Kuehnel,et al. A surface micromachined silicon accelerometer with on-chip detection circuitry , 1994 .
[6] H. Tilmans,et al. Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabrication , 1994 .
[7] Isao Shimoyama,et al. Microrobot actuated by a vibration energy field , 1994 .
[8] N. D. Rooij,et al. New design of micromachined capacitive force sensor , 1993 .
[9] F. Rudolf,et al. Electrodeposition of 3D microstructures on silicon , 1993 .
[10] J. Bernstein,et al. A micromachined comb-drive tuning fork rate gyroscope , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.
[11] L. Crawforth,et al. Batch-fabricated milli-actuators , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.
[12] K. Ikuta,et al. Real three dimensional micro fabrication using stereo lithography and metal molding , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.
[13] I. Shimoyama,et al. Creation of an insect-based microrobot with an external skeleton and elastic joints , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.
[14] E-beam induced fabrication of microstructures , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.
[15] Ronald S. Fearing,et al. Micro Structures and Micro Actuators for Implementing Sub-millimeter Robots , 1992 .
[16] J. Schweitz,et al. Truly three dimensional structures microfabricated by laser chemical processing , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[17] W. Benecke,et al. Electromagnetic microactuators with multiple degrees of freedom , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[18] D. Ehrlich,et al. Laser deposition and etching of three-dimensional microstructures , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[19] M. Esashi,et al. Smallest dead volume microvalves for integrated chemical analyzing systems , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[20] T. King,et al. Silicon monolithic micromechanical gyroscope , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[21] R. Muller,et al. Overhung electrostatic microgripper , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[22] W. Benecke,et al. Silicon-microactuators: activation mechanisms and scaling problems , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[23] Microcavity vacuum tube pressure sensor for robot tactile sensing , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[24] J. Bryzek,et al. Silicon Sensors And Microstructures , 1991, Electro International, 1991.
[25] W. Benecke,et al. Linear motion of dielectric particles and living cells in microfabricated structures induced by traveling electric fields , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.
[26] A. Heuberger,et al. Anisotropic Etching of Crystalline Silicon in Alkaline Solutions I . Orientation Dependence and Behavior of Passivation Layers , 1990 .
[27] H. Jerman,et al. Electrically-activated, micromachined diaphragm valves , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.
[28] K. Pister,et al. A planar air levitated electrostatic actuator system , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..
[29] William S. N. Trimmer,et al. Microrobots and micromechanical systems , 1989 .
[30] H. Fujita,et al. A proposal for a superconducting actuator using Meissner effect , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.
[31] David S. Barrett,et al. The world's largest one cubic inch robot , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.
[32] W. Riethmuller,et al. Applications of silicon microactuators based on bimorph structures , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.
[33] R. Muller,et al. IC-processed micro-motors: design, technology, and testing , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.
[34] R. Howe. Surface micromachining for microsensors and microactuators , 1988 .
[35] H. Lintel,et al. A piezoelectric micropump based on micromachining of silicon , 1988 .
[36] W. Riethmuller,et al. Thermally excited silicon microactuators , 1988 .
[37] N. D. Rooij,et al. A Novel Four-Electrode Electrochemica Etch-Stop Method for Silicon Membrane Formation , 1987 .
[38] K.E. Petersen,et al. Silicon as a mechanical material , 1982, Proceedings of the IEEE.
[39] K. Petersen. Dynamic micromechanics on silicon: Techniques and devices , 1978, IEEE Transactions on Electron Devices.