Thermoelectrical Properties of ITO/Pt, In2O3/Pt and ITO/In2O3 Thermocouples Prepared with Magnetron Sputtering

ITO/Pt, In2O3/Pt and ITO/In2O3 thermocouples were prepared by the radio frequency (RF) magnetron sputtering method. The XRD results showed that all the annealed ITO and In2O3 films annealed at high temperature present a cubic structure. Scanning electron microscope results showed that the thickness of the ITO and In2O3 films could reach 1.25 µm and 1.21 µm, respectively. The ITO/Pt and In2O3/Pt thin film thermocouples could obtain an output voltage of 68.7 mV and 183.5 mV, respectively, under a 900 °C temperature difference, and at the same time, the Seebeck coefficient reached 76.1 µV/°C and 203.9 µV/°C, respectively. For the ITO/In2O3 thermocouple, the maximum value of the output voltage was 165.7 mV under a 1200 °C temperature difference, and the Seebeck coefficient was 138.1 µV/°C. Annealing under different atmosphere conditions under 1000 °C, including vacuum, air and nitrogen atmospheres, resulted in values of the Seebeck coefficient that were 138.2 µV/°C, 135.5 µV/°C and 115.7 µV/°C, respectively.

[1]  Libo Zhao,et al.  Thermoelectricity and antivibration properties of screen-printed nanodoped In1.35ZnO2.11/In2O3 thin-film thermocouples on alumina substrates , 2022, Ceramics International.

[2]  Tianshu Liu,et al.  In-situ calibration for temperature-sensitive-paint heat-flux measurement on a finite base , 2019, International Journal of Heat and Mass Transfer.

[3]  A. Stokes,et al.  Leidenfrost heat engine: Sustained rotation of levitating rotors on turbine-inspired substrates , 2019, Applied Energy.

[4]  Zhuangde Jiang,et al.  Effect of magnetron sputtering parameters on adhesion properties of tungsten-rhenium thin film thermocouples , 2018, Ceramics International.

[5]  Jens von Wolfersdorf,et al.  A novel surface-integrated spray-on thermocouple for heat transfer measurements , 2018 .

[6]  Zahra Ghorbani-Tari,et al.  End-wall heat transfer of a rectangular bluff body at different heights: Temperature-sensitive paint measurement and computational fluid dynamics , 2017 .

[7]  R. Brooker,et al.  An experimental simulation of volcanic ash deposition in gas turbines and implications for jet engine safety , 2017 .

[8]  Xiaohui Zhao,et al.  Annealing effects in ITO based ceramic thin film thermocouples , 2017 .

[9]  Zhuangde Jiang,et al.  Tungsten-rhenium thin film thermocouples for SiC-based ceramic matrix composites. , 2017, The Review of scientific instruments.

[10]  D. Glass,et al.  Testing of Refractory Composites for Scramjet Combustors , 2016 .

[11]  J. Bennett,et al.  Failure mechanisms in Pt–Rhx thermocouple sensors caused by gaseous phosphorous species , 2016 .

[12]  T. Tsukamoto,et al.  IR sensor array using photo-patternable temperature sensitive paint for thermal imaging , 2015 .

[13]  D. Raoufi,et al.  The effect of substrate temperature on the microstructural, electrical and optical properties of Sn-doped indium oxide thin films , 2015 .

[14]  Xingzhao Liu,et al.  Fabrication and calibration of Pt–10%Rh/Pt thin film thermocouples , 2014 .

[15]  Ian M. Tougas,et al.  Metallic and Ceramic Thin Film Thermocouples for Gas Turbine Engines , 2013, Sensors.

[16]  Otto J. Gregory,et al.  Thin film platinum–palladium thermocouples for gas turbine engine applications , 2013 .

[17]  Gustave C. Fralick,et al.  Ceramic thin film thermocouples for SiC-based ceramic matrix composites , 2012 .

[18]  Otto J. Gregory,et al.  Stability and Microstructure of Indium Tin Oxynitride Thin Films , 2012 .

[19]  Wei Zhu,et al.  High-Temperature Sensor Based on Neutron-Irradiated 6H-SiC , 2011 .

[20]  V. A. Morozov,et al.  Temperature measurement with irradiated materials , 2011 .

[21]  Otto J. Gregory,et al.  Thin‐Film Thermocouples Based on the System In2O3–SnO2 , 2011 .

[22]  Gustave C. Fralick,et al.  Preparation and characterization of ceramic thin film thermocouples , 2010 .

[23]  James S. Wallace,et al.  A fast response thermocouple for internal combustion engine surface temperature measurements , 2010 .

[24]  T. You,et al.  Effect of aluminum doping on the high-temperature stability and piezoresistive response of indium tin oxide strain sensors , 2005 .

[25]  Herbert A. Will,et al.  Thin-film thermocouples and strain-gauge technologies for engine applications , 1998 .

[26]  Kenneth G. Kreider,et al.  Sputtered high temperature thin film thermocouples , 1993 .

[27]  K. Kreider.  Thin-film transparent thermocouples☆ , 1992 .

[28]  W. S. Cheung,et al.  The development of an optical fibre thermometer for gas turbine engines , 1989 .

[29]  Kenneth G. Kreider,et al.  Thin film thermocouples for internal combustion engines , 1986 .

[30]  S. Semancik,et al.  Thermal and sputtered aluminum oxide coatings for high temperature electrical insulation , 1985 .

[31]  Daniel F. García,et al.  Temperature Measurement Using the Wedge Method: Comparison and Application to Emissivity Estimation and Compensation , 2011, IEEE Transactions on Instrumentation and Measurement.

[32]  LI Yun-hong,et al.  Review of the Development of Temperature Measurement Technology with Infrared Thermal Imager , 2008 .