Structural, optical, and electrical properties of strained La-doped SrTiO3 films

The structural, optical, and room-temperature electrical properties of strained La-doped SrTiO3 epitaxial thin films are investigated. Conductive La-doped SrTiO3 thin films with concentration varying from 5 to 25% are grown by molecular beam epitaxy on four different substrates: LaAlO3, (LaAlO3)0.3(Sr2AlTaO6)0.7, SrTiO3, and DyScO3, which result in lattice mismatch strain ranging from −2.9% to +1.1%. We compare the effect of La concentration and strain on the structural and optical properties, and measure their effect on the electrical resistivity and mobility at room temperature. Room temperature resistivities ranging from ∼10−2 to 10−5 Ω cm are obtained depending on strain and La concentration. The room temperature mobility decreases with increasing strain regardless of the sign of the strain. The observed Drude peak and Burstein-Moss shift from spectroscopic ellipsometry clearly confirm that the La addition creates a high density of free carriers in SrTiO3. First principles calculations were performed to help understand the effect of La-doping on the density of states effective mass as well as the conductivity and DC relaxation time.

[1]  David J. Frank,et al.  The Quantum Metal Ferroelectric Field-Effect Transistor , 2014, IEEE Transactions on Electron Devices.

[2]  J. Curless,et al.  Optical Properties of Thin-Film SrTiO 3 on Si Grown by MBE , 2000 .

[3]  A. Biswas,et al.  La doped SrTiO3 thin films on SrLaAlO4 (001) as transparent conductor , 2013 .

[4]  S. Datta,et al.  Use of negative capacitance to provide voltage amplification for low power nanoscale devices. , 2008, Nano letters.

[5]  Susanne Stemmer,et al.  Effects of doping on the lattice parameter of SrTiO3 , 2012 .

[6]  Josef Humlíček,et al.  Far‐infrared ellipsometry of depleted surface layer in heavily doped n‐type GaAs , 1996 .

[7]  K. Kurihara,et al.  Publisher's Note: “Density functional theory and experimental study of the electronic structure and transport properties of La, V, Nb, and Ta doped SrTiO3” [J. Appl. Phys. 113, 013701 (2013)] , 2013 .

[8]  C. Leighton,et al.  Observation of electrically-inactive interstitials in Nb-doped SrTiO3. , 2013, ACS nano.

[9]  R. Moos,et al.  Defect Chemistry of Donor‐Doped and Undoped Strontium Titanate Ceramics between 1000° and 1400°C , 2005 .

[10]  V. Nagarajan,et al.  Epitaxial La-doped SrTiO3 on silicon: A conductive template for epitaxial ferroelectrics on silicon , 2002 .

[11]  H. Ohta,et al.  Electron transport and thermoelectric response of Nb- or La-doped SrTiO/sub 3/ epitaxial film at high-temperature , 2005, ICT 2005. 24th International Conference on Thermoelectrics, 2005..

[12]  H. Unoki,et al.  Dielectric Properties of SrTi O 3 at Low Temperatures , 1971 .

[13]  Alexander A. Demkov,et al.  Incorporation of la in epitaxial SrTiO3 thin films grown by atomic layer deposition on SrTiO3-buffered Si (001) substrates , 2014 .

[14]  H. Rietschel,et al.  HIGH DIELECTRIC CONSTANT AND TUNABILITY OF EPITAXIAL SRTIO3 THIN FILM CAPACITORS , 1999 .

[15]  A. Walsh,et al.  Origins of band-gap renormalization in degenerately doped semiconductors , 2008 .

[16]  U. Balachandran,et al.  Self-compensation in lanthanum-doped strontium titanate , 1981 .

[17]  O. Bierwagen,et al.  Epitaxial SrTiO3 films with electron mobilities exceeding 30,000 cm2 V(-1) s(-1). , 2010, Nature materials.

[18]  S. Stemmer,et al.  Enhancing the electron mobility of SrTiO3 with strain , 2011 .

[19]  Burke,et al.  Generalized Gradient Approximation Made Simple. , 1996, Physical review letters.

[20]  S. Zollner,et al.  Vibrational Properties of LaAlO 3 from Fourier-Transform Infrared Ellipsometry , 2013 .

[21]  A. Bostwick,et al.  Uniaxial strain induced band splitting in semiconducting SrTiO3 , 2013 .

[22]  P. Vogl,et al.  Subband structure and mobility of two-dimensional holes in strained Si/SiGe MOSFET’s , 1998 .

[23]  John A. Woollam,et al.  Optical properties of bulk and thin-film SrTiO3 on Si and Pt , 2000 .

[24]  G. Kresse,et al.  From ultrasoft pseudopotentials to the projector augmented-wave method , 1999 .

[25]  A. Majumdar,et al.  An Epitaxial Transparent Conducting Perovskite Oxide: Double-Doped SrTiO3 , 2010 .

[26]  Cronin B. Vining,et al.  A model for the high‐temperature transport properties of heavily doped n‐type silicon‐germanium alloys , 1991 .

[27]  H. Ohta,et al.  High-temperature carrier transport and thermoelectric properties of heavily La- or Nb-doped SrTiO3 single crystals , 2005 .

[28]  Gunnar Borstel,et al.  Bulk properties and electronic structure of SrTiO3, BaTiO3, PbTiO3 perovskites: an ab initio HF/DFT study , 2004 .

[29]  S. Stemmer,et al.  Toward an artificial Mott insulator: Correlations in confined high-density electron liquids in SrTiO3 , 2012, 1210.7497.

[30]  K. Horiba,et al.  Metallic Quantum Well States in Artificial Structures of Strongly Correlated Oxide , 2011, Science.

[31]  H. Monkhorst,et al.  SPECIAL POINTS FOR BRILLOUIN-ZONE INTEGRATIONS , 1976 .

[32]  A. Gloskovskii,et al.  Electronic structure of delta-doped La:SrTiO3 layers by hard x-ray photoelectron spectroscopy , 2012 .

[33]  A. Majumdar,et al.  Tuning the electronic effective mass in double-doped SrTiO3 , 2008, 0809.4706.

[34]  Engineering,et al.  Anomalously large measured thermoelectric power factor in Sr1−xLaxTiO3 thin films due to SrTiO3 substrate reduction , 2008, 0804.0443.

[35]  R. Mckee,et al.  Crystalline Oxides on Silicon: The First Five Monolayers , 1998 .

[36]  David J. Singh,et al.  BoltzTraP. A code for calculating band-structure dependent quantities , 2006, Comput. Phys. Commun..

[37]  Enhanced effective mass in doped SrTiO3 and related perovskites , 2005, cond-mat/0510013.

[38]  K.C. Chiang,et al.  High-Performance$hboxSrTiO_3$MIM Capacitors for Analog Applications , 2006, IEEE Transactions on Electron Devices.

[39]  A. Janotti,et al.  Strain effects on the electronic structure of SrTiO3: Toward high electron mobilities , 2011 .

[40]  S. Kauzlarich,et al.  Synthesis, structure, and properties of lanthanum strontium titanate (La1-xSrxTiO3) (0 .ltoreq. x .ltoreq. 1) , 1992 .

[41]  H. Hwang,et al.  Surface depletion in doped SrTiO3 thin films , 2004 .

[42]  Masashi Kawasaki,et al.  Electric-field-induced superconductivity in an insulator. , 2008, Nature materials.

[43]  C. Rogers,et al.  Thin-film field-effect transistors based on La-doped SrTiO3 heterostructures , 2004 .

[44]  H. Frederikse,et al.  Hall Mobility in SrTiO 3 , 1967 .

[45]  M. Saifi,et al.  Dielectric Properties of Strontium Titanate at Low Temperature , 1970 .

[46]  Maurice Kahn,et al.  Improved electrical properties using SrTiO3/Y2O3 bilayer dielectrics for MIM capacitor applications , 2007, Microelectron. Reliab..

[47]  Blöchl,et al.  Improved tetrahedron method for Brillouin-zone integrations. , 1994, Physical review. B, Condensed matter.

[48]  S. Stemmer,et al.  La-doped SrTiO3 films with large cryogenic thermoelectric power factors , 2013 .

[49]  J. Mannhart,et al.  Coexistence of magnetic order and two-dimensional superconductivity at LaAlO3/SrTiO3 interfaces , 2011, 1105.0235.

[50]  J. Greedan,et al.  Oxygen-deficient SrTiO3−x, x = 0.28, 0.17, and 0.08. Crystal growth, crystal structure, magnetic, and transport properties , 1991 .

[51]  Blöchl,et al.  Projector augmented-wave method. , 1994, Physical review. B, Condensed matter.

[52]  M. Yeadon Recent developments in oxide and metal epitaxy : theory and experiment , 2000 .

[53]  X. Yao,et al.  A new form of nanosized SrTiO3 material for near-human-body temperature oxygen sensing applications , 2004 .

[54]  J. A. Taylor,et al.  Empirical atomic sensitivity factors for quantitative analysis by electron spectroscopy for chemical analysis , 1981 .

[55]  H. Alshareef,et al.  Effect of oxygen vacancy distribution on the thermoelectric properties of La-doped SrTiO3 epitaxial thin films , 2012 .

[56]  Kresse,et al.  Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set. , 1996, Physical review. B, Condensed matter.

[57]  S. Gevorgian,et al.  Orientation and direct current field dependent dielectric properties of bulk single crystal SrTiO3 at microwave frequencies , 2003 .

[58]  Mark S. Lundstrom,et al.  FD integral calculator , 2011 .

[59]  R. C. Budhani,et al.  Two-dimensional superconductivity at a Mott insulator/band insulator interface LaTiO3/SrTiO3. , 2010, Nature communications.

[60]  P. W. Chapman,et al.  Electron Mobility in Semiconducting Strontium Titanate , 1967 .

[61]  Hideki Yamamoto,et al.  Experimental investigation of electronic properties of buried heterointerfaces of LaAlO3 on SrTiO3 , 2007 .