论文信息 - Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices - 字舞流文

Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices

R. Wolters | J. Schmitz | A. Kovalgin | J. Holleman | A. Aarnink | I. Brunets | A. Boogaard