High-Performance Metal-Insulator-Metal Tunnel Diode Selectors

We report on a novel high-performance metal-insulator-metal tunnel diode, with ultrathin atomic layer deposited Ta2O5, for bidirectional selector applications in resistive switching memory. The diode exhibits high drive current of over 105 A/cm2, high nonlinearity, and fast turn-on and turn-off times in the below-ns range. A very good uniformity for structures down to 40 nm size and excellent ac endurance is demonstrated, well exceeding the stand-alone nonvolatile memory requirements.

[1]  Zheng Zhang,et al.  Band alignment between Ta2O5 and metals for resistive random access memory electrodes engineering , 2013 .

[2]  O. Richard,et al.  Vacancy-modulated conductive oxide resistive RAM (VMCO-RRAM): An area-scalable switching current, self-compliant, highly nonlinear and wide on/off-window resistive switching cell , 2013, 2013 IEEE International Electron Devices Meeting.

[3]  C. Chung,et al.  A non-linear ReRAM cell with sub-1μA ultralow operating current for high density vertical resistive memory (VRRAM) , 2012, 2012 International Electron Devices Meeting.

[4]  Christoph Adelmann,et al.  Atomic Layer Deposition of Tantalum Oxide and Tantalum Silicate from Chloride Precursors , 2012 .

[5]  W. Marsden.  I and J , 2012 .

[6]  O. Richard,et al.  10×10nm2 Hf/HfOx crossbar resistive RAM with excellent performance, reliability and low-energy operation , 2011, 2011 International Electron Devices Meeting.

[7]  Kinam Kim,et al.  Bi-layered RRAM with unlimited endurance and extremely uniform switching , 2011, 2011 Symposium on VLSI Technology - Digest of Technical Papers.

[8]  I. Yoo,et al.  2-stack 1D-1R Cross-point Structure with Oxide Diodes as Switch Elements for High Density Resistance RAM Applications , 2007, 2007 IEEE International Electron Devices Meeting.

[9]  M. Rosmeulen,et al.  A model for tunneling current in multi-layer tunnel dielectrics , 2003 .

[10]  William D. Brown,et al.  Nonvolatile Semiconductor Memory Technology , 1997 .

[11]  T. K. Gustafson,et al.  Optical detection in thin‐film metal‐oxide‐metal diodes , 1974 .

[12]  E. Merzbacher.  Quantum mechanics , 1961 .