论文信息 - ULVAC research and development of Cat-CVD applications - 字舞流文

ULVAC research and development of Cat-CVD applications

Kazuya Saito | M. Hashimoto | M. Takagi | Masamichi Harada | S. Asari | Tetsushi Fujinaga | Michio Ishikawa

[1] Kazuya Saito,et al. A layer-by-layer Cat-CVD of conformal and stoichiometric silicon nitride with in-situ H2 post-treatment , 2006 .

[2] Kazuya Saito,et al. Development of catalytic chemical vapor deposition apparatus for large size substrates , 2004 .

[3] Kazuya Saito,et al. Coverage properties of silicon nitride film prepared by the Cat-CVD method , 2003 .

[4] K. Ishibashi. Development of the Cat-CVD apparatus and its feasibility for mass production , 2001 .

[5] A. Izumi,et al. Novel chamber cleaning method using atomic hydrogen generated by hot catalyzer , 2001 .