论文信息 - Construction of an Integrated Manufacturing System for 3D Microstructure

Construction of an Integrated Manufacturing System for 3D Microstructure — Concept, Design and Realization

Abstract An integrated manufacturing system for 3D microstructures was conceptualized, designed, and actually built. The system realized 3D shaping using a fast atom beam etching under rotation of workpieces, and 3D assembly using a concentric manipulator under observation of a multi-view scanning electron microscope. Through its demonstration of 3D micro manufacturing, it was clarified: Knowledge about conventional machine manufacturing is useful even in micro-manufacturing: The knowledge could be applied under new functions of zero reaction force 3D shaping, constant monitoring and on-one-table operating: An image based control proved effective for the integrated micro-manufacturing systems.

Yotaro Hatamura | Masayuki Nakao | Tetsuro Sato

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