A Piezoelectric Linear Actuator Controlled by the Reversed-Phase Connection of Two Bimorphs

A linear actuator controlled by the reversed-phase connection of two piezoelectric bimorphs is proposed in this study to solve the problem of drawback in the existing piezoelectric linear actuators. The actuator is driven by one excitation signal, the two piezoelectric bimorphs will always bend in opposite directions by the reversed-phase connection, so the directions of the force output by the two piezoelectric bimorphs are opposite. Because of the length difference of the clamping blocks, the two forces outputted by each bending is different in magnitude, and always have a resultant force in the same direction to make the actuator move forward two steps in one cycle without drawback. A series of experiments were conducted to evaluate the performance of the actuator provided. The starting voltage is 40 <inline-formula> <tex-math notation="LaTeX">$\text{V}_{\mathrm {p-p}}$ </tex-math></inline-formula>, resolution can reach <inline-formula> <tex-math notation="LaTeX">$1.16~\mu \text{m}$ </tex-math></inline-formula> without load. The load capacity of the actuator is 450 g with a 100 <inline-formula> <tex-math notation="LaTeX">$\text{V}_{\mathrm {p-p}}$ </tex-math></inline-formula> voltage, a 2-Hz frequency, and the average step displacement in this case is <inline-formula> <tex-math notation="LaTeX">$0.725~\mu \text{m}$ </tex-math></inline-formula>. The prototype has high linearity and good repeatability. Experiments have proved that the actuator controlled by reversed-phase connection can eliminate drawback in principle, and can move forward two steps in one cycle. The resolution of the prototype by the reversed-phase connection is much higher than the in-phase connection, and it is a new method to improve the driving performance of piezoelectric actuators.

[1]  Jianming Wen,et al.  A Novel Piezoelectric Inchworm Actuator Driven by One Channel Direct Current Signal , 2021, IEEE Transactions on Industrial Electronics.

[2]  J. Bao,et al.  A Novel PZT-Based Traveling-Wave Micromotor With High Performance and Unconstrained Coaxial Rotation , 2018, Journal of Microelectromechanical Systems.

[3]  Hengyu Li,et al.  Investigation on driving characteristics of a piezoelectric stick–slip actuator based on resonant/off-resonant hybrid excitation , 2017 .

[5]  H. Salarieh,et al.  Motion analysis of a vibrational micro-robot with two perpendicular harmonic actuators and deriving the design parameters in stick-slip-jump mode , 2016 .

[6]  Liang Wang,et al.  A friction regulation hybrid driving method for backward motion restraint of the smooth impact drive mechanism , 2016 .

[7]  Jiajia Zheng,et al.  An inertial piezoelectric hybrid actuator with large angular velocity and high resolution , 2019, Journal of Intelligent Material Systems and Structures.

[8]  Yingxiang Liu,et al.  Review on Multi-Degree-of-Freedom Piezoelectric Motion Stage , 2018, IEEE Access.

[9]  H. Trieu,et al.  Piezo‐bending actuators for isometric or auxotonic contraction analysis of engineered heart tissue , 2018, Journal of tissue engineering and regenerative medicine.

[10]  Shivam Chopra,et al.  Piezoelectric actuators with on-board sensing for micro-robotic applications , 2019, Smart Materials and Structures.

[11]  Chunsheng Zhao,et al.  A novel piezoelectric inertial rotary motor for actuating micro underwater vehicles , 2019, Sensors and Actuators A: Physical.

[12]  Jianming Wen,et al.  Theoretical Modeling and Experimental Validation of Inertial Piezoelectric Actuators , 2019, IEEE Access.

[13]  Jianming Wen,et al.  Novel inertial piezoelectric actuator with high precision and stability based on a two fixed-end beam structure , 2018, Smart Materials and Structures.

[14]  Jianming Wen,et al.  A two-fixed-end beam piezoelectric inertial actuator using electromagnet controlled magnetorheological fluid (MRF) for friction regulation , 2020, Smart Materials and Structures.

[15]  Liangguo He,et al.  Inertial piezoelectric linear motor driven by a single-phase harmonic wave with automatic clamping mechanism. , 2018, The Review of scientific instruments.

[16]  Yingxiang Liu,et al.  A review of recent studies on non-resonant piezoelectric actuators , 2019, Mechanical Systems and Signal Processing.

[17]  Hairen Wang,et al.  Linear and nonlinear analysis of the thermal effects of beam piezoelectric bending actuator on adaptive optics , 2017 .

[18]  Hongwei Zhao,et al.  Design and experimental performances of a piezoelectric linear actuator by means of lateral motion , 2015 .

[19]  Zhiwei Zhu,et al.  Design and Trajectory Tracking of a Nanometric Ultra-Fast Tool Servo , 2020, IEEE Transactions on Industrial Electronics.

[20]  Jianming Wen,et al.  A linear inertial piezoelectric actuator using a single bimorph vibrator , 2019, Smart Materials and Structures.

[21]  Zhonghua Zhang,et al.  A new inertial piezoelectric rotary actuator based on changing the normal pressure , 2013 .

[22]  Dalius Mažeika,et al.  An inertial piezoelectric plate type rotary motor , 2017 .

[23]  Willy Charon,et al.  Benefits of amplification in an inertial stepping motor , 2012 .

[25]  Yili Hu,et al.  Design and Experimental Performance of a Novel Piezoelectric Inertial Actuator for Magnetorheological Fluid Control Using Permanent Magnet , 2019, IEEE Access.

[26]  Chengkuo Lee,et al.  Novel piezoelectric actuation mechanism for a gimbal-less mirror in 2D raster scanning applications , 2011 .

[27]  Weibin Rong,et al.  Design, analysis and experimental performance of a novel stick-slip type piezoelectric rotary actuator based on variable force couple driving , 2017 .

[28]  Jianming Wen,et al.  A novel linear inertial piezoelectric actuator based on asymmetric clamping materials , 2020 .

[30]  Yili Hu,et al.  A Low-Frequency Structure-Control-Type Inertial Actuator Using Miniaturized Bimorph Piezoelectric Vibrators , 2019, IEEE Transactions on Industrial Electronics.

[31]  Kang Chen,et al.  An asymmetrical inertial piezoelectric rotary actuator with the bias unit , 2016 .

[32]  Zhaojun Yang,et al.  A novel driving principle by means of the parasitic motion of the microgripper and its preliminary application in the design of the linear actuator. , 2012, The Review of scientific instruments.

[33]  S. Cramer,et al.  High-resolution monochromator for iron nuclear resonance vibrational spectroscopy of biological samples , 2016, Japanese journal of applied physics. Part 1, Regular papers & short notes.

[34]  Yanling Tian,et al.  A flexure-based mechanism and control methodology for ultra-precision turning operation , 2009 .

[35]  Hu Yili,et al.  Piezoelectric inertial rotary actuators based on asymmetrically clamping structures , 2015 .