High performance of a semipolar InGaN laser with a phase-shifted embedded hydrogen silsesquioxane (HSQ) grating.

Single-frequency blue laser sources are of interest for an increasing number of emerging applications but are still difficult to implement and expensive to fabricate and suffer from poor robustness. Here a novel and universal grating design to realize distributed optical feedback in visible semiconductor laser diodes (LDs) was demonstrated on a semipolar InGaN LD, and its unique effect on the laser performance was investigated. For the first time, to the best of our knowledge, a low threshold voltage, record-high power output, and ultra-narrow single-mode lasing were simultaneously obtained on the new laser structure with a thinner p-GaN layer and a third-order phase-shifted embedded dielectric grating. Under continuous-wave operation, such 450 nm lasers achieved 35 dB side-mode suppression ratio, less than 2 pm FWHM, and near 400 mW total output power at room temperature.

[1]  M. Kneissl,et al.  Continuous-wave operation of DFB laser diodes based on GaN using 10$^{\rm th}$th-order laterally coupled surface gratings. , 2020, Optics letters.

[2]  Shuji Nakamura,et al.  Continuous-wave operation of a semipolar InGaN distributed-feedback blue laser diode with a first-order indium tin oxide surface grating. , 2019, Optics letters.

[3]  Shuji Nakamura,et al.  Semipolar InGaN blue laser diodes with a low optical loss and a high material gain obtained by suppression of carrier accumulation in the p-waveguide region , 2019, Japanese Journal of Applied Physics.

[4]  Amit Yadav,et al.  Continuous-wave operation of (Al,In)GaN distributed-feedback laser diodes with high-order notched gratings , 2018, Applied Physics Express.

[5]  Shuji Nakamura,et al.  Demonstration of enhanced continuous-wave operation of blue laser diodes on a semipolar 202¯1¯ GaN substrate using indium-tin-oxide/thin-p-GaN cladding layers. , 2018, Optics express.

[6]  M. Dumitrescu,et al.  Transverse structure optimization of distributed feedback and distributed Bragg reflector lasers with surface gratings , 2017 .

[7]  S. Denbaars,et al.  Nonpolar III-nitride vertical-cavity surface-emitting lasers incorporating an ion implanted aperture , 2015 .

[8]  A. Matsko,et al.  Ultralow noise miniature external cavity semiconductor laser , 2015, Nature Communications.

[9]  Hao-Chung Kuo,et al.  450-nm GaN laser diode enables high-speed visible light communication with 9-Gbps QAM-OFDM. , 2015, Optics express.

[10]  Manoj Das,et al.  Cryogenic optical lattice clocks , 2015, Nature Photonics.

[11]  C. Merckling,et al.  Room-temperature InP distributed feedback laser array directly grown on silicon , 2015, Nature Photonics.

[12]  H. Türeci,et al.  Enhancement of laser power-efficiency by control of spatial hole burning interactions , 2014, Nature Photonics.

[13]  L. Coldren,et al.  Diode Lasers and Photonic Integrated Circuits: Coldren/Diode Lasers 2E , 2012 .

[14]  A. Landragin,et al.  Dual-wavelength laser source for onboard atom interferometry. , 2011, Optics letters.

[15]  David A. Ritchie,et al.  Quasi-periodic distributed feedback laser , 2010 .

[16]  W. Scheibenzuber,et al.  Calculation of optical eigenmodes and gain in semipolar and nonpolar InGaN/GaN laser diodes , 2009 .

[17]  Takashi Mukai,et al.  CW Operation of the First-Order AlInGaN 405 nm Distributed Feedback Laser Diodes , 2006 .

[18]  Xu Xie,et al.  Detection of broadband terahertz waves with a laser-induced plasma in gases. , 2006, Physical review letters.

[19]  Hans Wenzel,et al.  Green's function based simulation of the optical spectrum of multisection lasers , 2003 .

[20]  Geert Morthier,et al.  Gain-coupled DFB lasers versus index-coupled and phase shifted DFB lasers: a comparison based on spatial hole burning corrected yield , 1991 .

[21]  Tatsuo Harada,et al.  Corrugation-pitch modulated MQW-DFB lasers with narrow spectral linewidth , 1991 .

[22]  Ping Zhou,et al.  Phase‐shifted distributed feedback laser with linearly chirped grating for narrow linewidth and high‐power operation , 1991 .

[23]  N. Chinone,et al.  Corrugation-pitch-modulated phase-shifted DFB laser , 1989, IEEE Photonics Technology Letters.

[24]  Chinlon Lin,et al.  Subnanosecond tunable dye laser pulse generation by controlled resonator transients , 1975, IEEE Journal of Quantum Electronics.

[25]  P. Hammond,et al.  Search for Wide-range Tunable Dye Laser Systems , 1971 .