Atomically smooth surfaces through thermoplastic forming of metallic glass

We demonstrate that atomically smooth surfaces can be generated by thermoplastic forming of metallic glasses. This is enabled by the flow associated with the contact-line motion which removes rough surface layer from the advancing metallic glass-air interface. The thermoplastically formed surface is two orders of magnitude smoother than a polished surface of the same alloy. This process is capable of generating atomically smooth surfaces and replicating nanoscale features in a single processing step, providing a versatile toolbox for nanofabrication.

[1]  Y. Saotome,et al.  Superplastic nanoforming of Pd-based amorphous alloy , 2001 .

[2]  Parmanand Sharma,et al.  Nano-fabrication with metallic glass—an exotic material for nano-electromechanical systems , 2007, Nanotechnology.

[3]  Akira Shimokohbe,et al.  Microforming of three-dimensional microstructures from thin-film metallic glass , 2003 .

[4]  Norman J. Brown Preparation of Ultrasmooth Surfaces , 1986 .

[5]  A. Inoue Stabilization of metallic supercooled liquid and bulk amorphous alloys , 2000 .

[6]  M. Lagally,et al.  Comparison of surface roughness of polished silicon wafers measured by light scattering topography, soft‐x‐ray scattering, and atomic‐force microscopy , 1995 .

[7]  S. Creager,et al.  Consequences of microscopic surface roughness for molecular self-assembly , 1992 .

[8]  T. Hufnagel,et al.  Mechanical behavior of amorphous alloys , 2007 .

[9]  Y. Saotome,et al.  The micro-nanoformability of Pt-based metallic glass and the nanoforming of three-dimensional structures , 2002 .

[10]  J. Schroers Processing of Bulk Metallic Glass , 2010, Advanced materials.

[11]  Chung-Yu Wu,et al.  Nanoimprint of gratings on a bulk metallic glass , 2007 .

[12]  L. Scriven,et al.  Hydrodynamic Model of Steady Movement of a Solid / Liquid / Fluid Contact Line , 1971 .

[13]  Jan Schroers,et al.  On the formability of bulk metallic glass in its supercooled liquid state , 2008 .

[14]  J. Schroers,et al.  Nanomoulding with amorphous metals , 2009, Nature.

[15]  Christine D. Keating,et al.  Self-assembly of single electron transistors and related devices , 1998 .

[16]  John A. Rogers,et al.  Polymer Imprint Lithography with Molecular-Scale Resolution , 2004 .

[17]  J. Gilman,et al.  Nanotechnology , 2001 .

[18]  Weihua Wang,et al.  Bulk metallic glasses , 2004 .

[19]  W. Johnson Bulk Glass-Forming Metallic Alloys: Science and Technology , 1999 .

[20]  Jae-Young Yu,et al.  Silicon nanowire devices , 2000 .

[21]  Sang‐Hyun Oh,et al.  Ultrasmooth Patterned Metals for Plasmonics and Metamaterials , 2009, Science.

[22]  Charles M. Lieber,et al.  Functional nanoscale electronic devices assembled using silicon nanowire building blocks. , 2001, Science.

[23]  W. Wu,et al.  Ultra-smooth metal surfaces generated by pressure-induced surface deformation of thin metal films , 2007 .