Shape measurement with modified phase-shift lateral shearing interferometry illumination and radial basis function.

Three-dimensional shapes of objects were evaluated with modified phase-shift lateral shearing interferometry illumination and radial basis function. A simple optical system was developed to create the fringe pattern based on the Murty interferometer. The phase shift was generated only by moving a plane-parallel plate along an in-plane parallel direction. A novel moving radial basis function method was presented to improve the quality of fringe patterns. And the proper calculation window size was given based on numerical simulation. Three-dimensional shapes of two kinds of objects were determined to verify the feasibility and effectiveness of the proposed method, and the reconstructed height distributions were in good accordance with the referenced data.

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