论文信息 - Determination of ion incidence angles in plasma immersion ion implantation by means of a hollow multi-aperture target - 字舞流文

Determination of ion incidence angles in plasma immersion ion implantation by means of a hollow multi-aperture target

K. Volz | W. Ensinger | H. Klein | C. Gabor | R. Thomae | M. Galonska

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