论文信息 - 3-D MOEMS mirror for laser beam pointing and focus control

3-D MOEMS mirror for laser beam pointing and focus control

A biaxial torsion scan mirror with a deformable membrane surface is described. The 700-mm-diameter optical surface can be tilted /spl plusmn/4/spl deg/ about two orthogonal axes and can be deformed to a parabola with greater than 3-mm sag at the membrane center. The surface, therefore, acts as a lens with variable focal length ranging from /spl infin/ to 10 mm. Mirror architecture and applications in three-dimensional beam pointing and scanning are discussed.

D. Dickensheets | Yuhe Shao | D.L. Dickensheets | P. Himmer | P. Himmer

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