Copper film deposition by a hot refractory anode vacuum arc
暂无分享,去创建一个
[1] I. Beilis,et al. Interelectrode plasma evolution in a hot refractory anode vacuum arc: Theory and comparison with experiment , 2002 .
[2] I. Beilis,et al. Radially expanding plasma parameters in a hot refractory anode vacuum arc , 2000 .
[3] I. Beilis,et al. The hot refractory anode vacuum arc: a new plasma source for metallic film deposition , 2000 .
[4] M. Keidar,et al. Interelectrode plasma parameters and plasma deposition in a hot refractory anode vacuum arc , 2000 .
[5] K. G. Müller,et al. The anodic vacuum arc and its application to coating , 1990 .
[6] J. Daalder. Components of cathode erosion in vacuum arcs , 1976 .