Design, Modeling and Analysis of a Novel Piezoactuated XYZ Compliant Mechanism for Large Workspace Nano-positioning

This paper shows a novel piezo-actuated three-degree-of-freedom (3-DOF) XYZ compliant mechanism for large workspace micro/nano positioning, actuated by three piezoelectric actuators (PEAs). By means of bridge-type mechanisms, large working range of nano-positioning mechanism in three directions are achieved. Meanwhile, the dual leaf parallelogram hinges mechanisms (DLPH) and mirror symmetric configuration of XY-direction are used to guide parallel motion and guarantee high motion accuracy. Accurate kinematics analysis considering input coupling indicates the proposed compliant mechanism can achieve a three-dimensional working range. The finite element analysis shows the working range of 83.7μm*83.7μm*50.4μm in XYZ-direction can be realized. In general, the proposed mechanism can generate the precise position of large workspace in XYZ.