Active aberration- and point-spread-function control in direct laser writing.

We control the point-spread-function of high numerical aperture objectives used for direct laser writing with a spatial light modulator. Combining aberration correction with different types of amplitude filters to reduce the aspect ratio of the point-spread-function enhances the structural and optical quality of woodpile photonic crystals. Here, aberration correction is crucial to ensure the functionality of the filters. Measured point-spread-functions compare well with numerical calculations and with structures generated by direct laser writing. The shaped point-spread-function not only influences the maximum achievable three-dimensional resolution but also proximity effect and optical performance of woodpile photonic crystals.

[1]  Tony Wilson,et al.  The imaging of dielectric point scatterers in conventional and confocal polarisation microscopes , 1997 .

[2]  Satoshi Kawata,et al.  Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication , 1998 .

[3]  Georg Jakopic,et al.  Two-photon 3D lithography: A Versatile Fabrication Method for Com- plex 3D Shapes and Optical Interconnects within the Scope of Innovative Industrial Applications , 2007 .

[4]  Che Ting Chan,et al.  Photonic band gaps in three dimensions: New layer-by-layer periodic structures , 1994 .

[5]  M. Wegener,et al.  Gold Helix Photonic Metamaterial as Broadband Circular Polarizer , 2009, Science.

[6]  Jeffrey A. Davis,et al.  Encoding amplitude information onto phase-only filters. , 1999, Applied optics.

[7]  Alexander Jesacher,et al.  Adaptive aberration compensation for three-dimensional micro-fabrication of photonic crystals in lithium niobate. , 2011, Optics express.

[8]  J. Fischer,et al.  Three‐dimensional optical laser lithography beyond the diffraction limit , 2013 .

[9]  M. Wegener,et al.  Fabrication of Silicon Inverse Woodpile Photonic Crystals , 2007, 2007 Conference on Lasers and Electro-Optics (CLEO).

[10]  Martin Wegener,et al.  Tailored 3D Mechanical Metamaterials Made by Dip‐in Direct‐Laser‐Writing Optical Lithography , 2012, Advanced materials.

[11]  J. Fischer,et al.  Elastic Fully Three‐dimensional Microstructure Scaffolds for Cell Force Measurements , 2010, Advanced materials.

[12]  Ludovico Cademartiri,et al.  Three-dimensional silicon inverse photonic quasicrystals for infrared wavelengths , 2006, Nature materials.

[13]  M. Wegener,et al.  Fabrication and characterization of silicon woodpile photonic crystals with a complete bandgap at telecom wavelengths. , 2010, Optics letters.

[14]  H. Giessen,et al.  Three-dimensional metamaterials at optical frequencies , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[15]  Martin Ams,et al.  Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses. , 2005, Optics express.

[16]  J. Braat,et al.  Calculation of the vectorial field distribution in a stratified focal region of a high numerical aperture imaging system. , 2004, Optics express.

[17]  Martin Wegener,et al.  Three‐Dimensional Bi‐Chiral Photonic Crystals , 2009 .

[18]  Kurt Busch,et al.  Three‐Dimensional Nanostructures for Photonics , 2010 .

[19]  B. J. Metcalf,et al.  Adaptive slit beam shaping for direct laser written waveguides. , 2012, Optics letters.

[20]  M. Wegener,et al.  Direct laser writing of three-dimensional photonic-crystal templates for telecommunications , 2004, Nature materials.

[21]  J. Pendry,et al.  Three-Dimensional Invisibility Cloak at Optical Wavelengths , 2010, Science.

[22]  F A Gianturco,et al.  Vibrational excitation of CF4 by electron impact: a computational analysis , 2005 .

[23]  Alexander Jesacher,et al.  Parallel direct laser writing in three dimensions with spatially dependent aberration correction. , 2010, Optics express.

[24]  M. J. Padgett,et al.  Vortex knots in light , 2005 .

[25]  T Wilson,et al.  Optimized pupil-plane filters for confocal microscope point-spread function engineering. , 2000, Optics letters.

[26]  Martin Wegener,et al.  3D Bi‐chiral Photonic Crystals: Three‐Dimensional Bi‐Chiral Photonic Crystals (Adv. Mater. 46/2009) , 2009 .