论文信息 - Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in, wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.

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