Micro mirror for hybrid optical integration circuit and manufacturing method thereof, micro mirror-optical detector assembly and hybrid optical integrating circuit assembly for optical receiving

A micro-mirror present invention is to incident on the active area of ​​a hybrid optical integrated circuit device to refract the light emitted parallel to the substrate surface from the optical fiber or optical waveguide to the top surface of the substrate attached to the substrate with surface-mount method flat light-receiving optical detector in, the integration of the production method thereof and a micro-mirror and a light detector in the micro mirror relates to the light receiving credit hybrid configured to align with an optical waveguide attached on the photo-detector assembly hybrid substrate optical integrated circuit assembly-photodetector assembly, and a micro-mirror. A micro-mirror 20 according to the present invention is a mirror for converting the optical path of the hybrid optical integrated circuit, a V-groove 22 having a at one side of the central portion of the silicon substrate, the inclined surface that acts as a mirror surface 21 characterized in that the formed and, by attaching the photo-detector, such as the one micro-mirror device 20 on the photo diode micro-mirror - and the photo-detector assembly structures, the one micro-mirror-optical waveguide on another substrate a photodetector assembly in the above optical waveguide it was attached across the light in parallel to release the substrate surface and is reflected onto the substrate in the mirror surface of said one device by forming to be incident on the optical detector, is configured light receiving credit hybrid optical integrated circuit assembly of the present invention do.