Aerial image based die-to-model inspections of advanced technology masks
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Shmoolik Mangan | Jun Kim | Vivek Balasubramanian | Michael Penn | Lev Faivishevsky | Rajesh Nagpal | Mark Wagner | Joan McCall | Aviram Tam | Michael Ben-Yishai | Udy Danino | Wei-Guo Lei | Suheil Zaatri | Oded Dassa | Tejas H. Shah
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[3] Shmoolik Mangan,et al. Theoretical foundations of die-to-model inspection , 2009, Photomask Technology.