Magnetic materials for MEMS applications

This topical review discusses magnetic microelectromechanical systems (MagMEMS). A number of exemplars are drawn from the authors' own work, and a review is given of other significant literature in the area. The case is made that MagMEMS offer unique features over conventional MEMS, such as remote interrogation and self-test. A review of the key magnetic principles and magnetic materials is included by way of a guide to the general reader. Finally, a roadmap for the future development of MagMEMS is set out.

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