论文信息 - Effect of Potential Field on Ion Deflection and Shape Evolution of Trenches during Plasma‐Assisted Etching - 字舞流文

Effect of Potential Field on Ion Deflection and Shape Evolution of Trenches during Plasma‐Assisted Etching

Modele mathematique pour etudier l'evolution de la forme des tranchees au cours de la gravure assistee par plasma

D. J. Economou | Richard C. Alkire | Demetre J. Economou | R. Alkire

[1] J. Liggett,et al. The Boundary Integral Equation Method for Porous Media Flow , 1982 .

[2] J. C. Jaeger,et al. Conduction of Heat in Solids , 1952 .