Homogeneity of metal plasma immersion ion implantation and deposition
暂无分享,去创建一个
[1] S. Mändl,et al. Filtered arc deposition and implantation of aluminium nitride , 2001 .
[2] A. Anders,et al. Correlation between cathode properties, burning voltage, and plasma parameters of vacuum arcs , 2001 .
[3] A. Anders. Width, structure and stability of sheaths in metal plasma immersion ion implantation and deposition: measurements and analytical considerations , 2001 .
[4] K. Yukimura,et al. TiN coating and ion implantation of materials with three-dimensional topology in metal DC plasma-based ion implantation , 2001 .
[5] M. Bilek. Effect of sheath evolution on metal ion implantation in a vacuum arc plasma source , 2001 .
[6] J. W. Gerlach,et al. Texture Development in Titanium Nitride Films Grown by Low-Energy Ion Assisted Deposition , 2000 .
[7] U. Rüde,et al. Simulation of trench homogeneity in plasma immersion ion implantation , 2000 .
[8] S. Mändl,et al. Plasma immersion ion implantation using titanium and oxygen ions , 2000 .
[9] W. Assmann,et al. Trench homogeneity in plasma immersion ion implantation , 2000 .
[10] André Anders,et al. Approaches to rid cathodic arc plasmas of macro-and nanoparticles : a review , 1999 .
[11] P. Chu,et al. Investigation of dose uniformity on the inner races of bearings treated by plasma immersion ion implantation , 1999 .
[12] W. Möller,et al. Sheath and presheath dynamics in plasma immersion ion implantation , 1998 .
[13] A. Anders. Ion charge state distributions of vacuum arc plasmas: The origin of species , 1997 .
[14] T. E. Sheridan. Ion focusing by an expanding, two‐dimensional plasma sheath , 1996 .
[15] K. Yu,et al. Novel metal ion surface modification technique , 1991 .
[16] Michael A. Lieberman,et al. Model of plasma immersion ion implantation , 1989 .
[17] I. Donnelly,et al. Plasma immersion ion implantation using plasmas generated by radio frequency techniques , 1988 .
[18] J. R. Conrad,et al. Plasma source ion-implantation technique for surface modification of materials , 1987 .