论文信息 - Efficient fiber to SOI photonic wire coupler fabricated using standard CMOS technology

Efficient fiber to SOI photonic wire coupler fabricated using standard CMOS technology

We present a silicon-on-insulator spot size converter fabricated using 248 nm deep UV lithography. The loss of the taper structure is around 1 dB over more than 60 nm in wavelength range while the overall coupling loss from a lensed fiber into a 590 nm wide SOI waveguide was measured to be 1.9 dB.

P. Dumon | R. Baets | W. Bogaerts | D. van Thourhout | G. Roelkens

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