论文信息 - Industrial high-rate (∼14 nm/s) deposition of low resistive and transparent ZnOx:Al films on glass - 字舞流文

Industrial high-rate (∼14 nm/s) deposition of low resistive and transparent ZnOx:Al films on glass

J. van Deelen | A. Janssen | A. Illiberi | E. Beckers | H. Steijvers | P. Simons | D. Habets | B. Kniknie