Ion Beam Processing of Optical Thin Films

The microstructure and optical properties of vacuum evaporated coatings are a sensitive function of the deposition conditions. In recent years, ion bombardment has been used increasingly for the production of denser, more stable coatings of oxides and other materials. In addition to modifying the microstructure, ion bombardment is emerging as a valuable tool for altering the composition (and hence the optical properties) of thin films. A discussion of the effects of ion beam processing and the methods used to analyze the changes in these films is presented.

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