Multilayer optics for x-ray and γ radiation

We report the experimental results on production of multilayer soft x-ray and EUV mirrors and their application in x-ray spectroscopy and fluorescence analysis, as well as for development of EUV lithographic and x-ray microscopic devices and soft x-ray point sources. The problem of the production and the investigation of short-period x-ray multilayers and multilayer (gamma) -filters is discussed.

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