Significant Improvement of Inversion Channel Mobility in 4H-SiC MOSFET on (11-20) Face Using Hydrogen Post-Oxidation Annealing
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K. Fukuda | S. Harada | J. Senzaki | K. Kojima | K. Arai | Seiji Suzuki | Takaya Suzuki | R. Kosugi
暂无分享,去创建一个
K. Fukuda | S. Harada | J. Senzaki | K. Kojima | K. Arai | Seiji Suzuki | Takaya Suzuki | R. Kosugi