Applications Of Image Analysis For Infrared Microspectroscopic Detection Of Contaminants On Microelectronic Devices

The use of infrared microscopy imaging for location and identification of contaminants on microelectronic devices is discussed. Several methods for reconstruction of images from the spectrum acquired at each pixel were compared. Peak-height and peak-integration methods require prior knowledge of the contaminant to narrow the spectral region of interest. These frequency-limited methods performed better than full-spectrum methods. When full-spectrum methods must be used, Gram-Schmidt reconstruction performed better than integration.