An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate 1 Paper presented

Abstract The fabrication and characterization of an integrated gas sensor based on tin oxide thin-film and improved micro-hotplate (MHP) are presented in this paper. Tin oxide thin-films are sputtered onto the MHP from tin dioxide target or pure tin metal target under different sputtering conditions. The properties of the films are analyzed by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sensors are characterized in an automated precision characterization system. Sensors are characterized in both dynamic and static modes. In the dynamic mode, a gas analyzer is used to extract the gas out of the measurement chamber. In the static mode, the gas analyzer is replaced by a gas chromatography port.

[1]  Johnny K. O. Sin,et al.  An automated precision gas sensor characterization system , 1995, 1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings.

[2]  P. Chan,et al.  Thermal Analysis And Design Of A Micro-hotplate For Integrated Gas Sensor Applications , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[3]  P. Chan,et al.  Micro-hotplate for thin film gas sensor: fabrication using cmos technology , 1994, International Electron Devices and Materials Symposium.

[4]  M. Gaitan,et al.  Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing , 1993, IEEE Electron Device Letters.