LIGA technology today and its industrial applications
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Ulrike Wallrabe | Joachim Schulz | Song-Jo Chung | Herbert Hein | Juergen Mohr | F. J. Pantenburg | U. Wallrabe | J. Schulz | J. Mohr | H. Hein | Song-Jo Chung | Franz J. Pantenburg
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[2] S. McNamara,et al. Direct, high throughput LIGA for commercial applications: a progress report , 2000 .
[3] Juergen Mohr,et al. Micro cycloid-gear system fabricated by multiexposure LIGA technique , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[4] Juergen Mohr,et al. Microspectrometer system for the near-infrared wavelength range based on LIGA technology , 2000, BiOS.
[5] F. Pantenburg,et al. Influence of developer temperature and resist material on the structure quality in deep x-ray lithography , 1998 .
[6] Volker Saile,et al. Electromagnetically driven microchopper for integration into microspectrometers based on the LIGA technology , 1999 .
[7] Juergen Mohr,et al. A micro cycloid-gear system fabricated by multi-exposure LIGA technique , 2000 .
[8] Ulrike Wallrabe,et al. Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor , 1998 .
[9] Ulrike Wallrabe,et al. Optical 2x2 switch matrix with electromechanical micromotors , 2000, SPIE MOEMS-MEMS.