Fabrication and characterization of a fuel flexible micro-reformer fully integrated in silicon for micro-solid oxide fuel cell applications

A novel design of a fuel-flexible micro-reactor for hydrogen generation from ethanol and methane is proposed in this work. The micro-reactor is fully fabricated with mainstream MEMS technology and consists of an array of more than 20000 through-silicon vertically aligned micro-channels per cm2 of 50 μm in diameter. Due to this unique configuration, the micro-reformer presents a total surface per projected area of 16 cm2/cm2 and per volume of 320 cm2/cm3. The active surface of the micro-reformer, i.e. the walls of the micro-channels, is homogenously coated with a thin film of Rh- Pd/CeO2 catalyst. Excellent steam reforming of ethanol and dry reforming of methane are presented with hydrogen production rates above 3 mL/min·cm2 and hydrogen selectivity of ca. 50% on a dry basis at operations conditions suitable for application in micro-solid oxide fuel cells (micro-SOFCs), i.e. 700-800ºC and fuel flows of 0.02 mLL/min for ethanol and 36 mLG/min for methane (corresponding to a system able to produce one electrical watt).

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