Performance Evaluation Of The Ateq Core-2000 Scanning Laser Reticle Writer

ATEQ Corporation has developed a high precision, high performance optical lithography system, the CORE-2000, based on scanning laser technology and optimized for the high speed writing of 5X and 10X reticles. A detailed evaluation of this system has been made using Nikon 21 measurement systems, KLA inspection systems, and throughput benchmark test patterns. This paper briefly describes the CORE-2000 and presents the results of this evaluation including registration performance, critical dimension control, defect control and throughput.