Semiconductor gas sensor based on Pd-doped SnO2 nanorod thin films

SnO2 nanorod thin films have been prepared by plasma-enhanced chemical vapor deposition (PECVD) with postplasma treatment. The SnO2 nanorod thin films were surface modified with Pd nanoparticles and their sensing properties towards H2 and ethanol gas were studied. It was found that the Pd-doped SnO2 nanorod thin film sensor exhibits 6 and 2.5 times better response to 1000 ppm H2 and ethanol at 300 ◦ C compared to the un-doped sample. The improved gas-sensing properties were believed to result from the formation of electron depletion layer and enhanced catalytic dissociation of molecular adsorbates on the Pd nanoparticle surfaces. © 2008 Elsevier B.V. All rights reserved.

[1]  O. Tan,et al.  In situ growth of SnO2 nanorods by plasma treatment of SnO2 thin films , 2006 .

[2]  G. Korotcenkov.  Gas response control through structural and chemical modification of metal oxide films: state of the art and approaches , 2005 .

[3]  R. P. Agarwal,et al.  Sensitivity, response and recovery time of SnO2 based thick-film sensor array for H2, CO, CH4 and LPG , 1998 .

[4]  Ying Liu,et al.  Growth of Aligned Square‐Shaped SnO2 Tube Arrays , 2005 .

[5]  N. Yamazoe,et al.  Oxide Semiconductor Gas Sensors , 2003 .

[6]  Y. C. Lee,et al.  Semiconductor gas sensor based on tin oxide nanorods prepared by plasma-enhanced chemical vapor deposition with postplasma treatment , 2005 .

[7]  M. S. Tse,et al.  Deposition of nanostructured thin films using an inductively coupled plasma chemical vapor deposition technique , 2004 .

[8]  Ooi Kiang Tan,et al.  Effects of plasma treatment on the growth of SnO2 nanorods from SnO2 thin films , 2006 .

[9]  Dmitri O. Klenov,et al.  Enhanced gas sensing by individual SnO2 nanowires and nanobelts functionalized with Pd catalyst particles. , 2005, Nano letters.

[10]  Q. Wan,et al.  Single-crystalline Sb-doped SnO2 nanowires: synthesis and gas sensor application. , 2005, Chemical communications.

[11]  Ghenadii Korotcenkov,et al.  Influence of surface Pd doping on gas sensing characteristics of SnO2 thin films deposited by spray pirolysis , 2003 .

[12]  Martin Moskovits,et al.  Detection of CO and O2 Using Tin Oxide Nanowire Sensors , 2003 .

[13]  Choongho Yu,et al.  Integration of metal oxide nanobelts with microsystems for nerve agent detection , 2005 .

[14]  Giorgio Sberveglieri,et al.  Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts , 2002 .

[15]  L. Vasanelli,et al.  Sol–gel derived pure and palladium activated tin oxide films for gas-sensing applications , 1999 .

[16]  N. Nakatani,et al.  Effect of density and thickness on H2-gas sensing property of sputtered SnO2 films , 2005 .

[17]  Peidong Yang,et al.  Photochemical sensing of NO(2) with SnO(2) nanoribbon nanosensors at room temperature. , 2002, Angewandte Chemie.

[18]  N. Ramgir,et al.  A room temperature nitric oxide sensor actualized from Ru-doped SnO2 nanowires , 2005 .