Characterization of an optically pumped ZnO-based 3rd order distributed feedback laser

An optically pumped ZnO distributed feedback laser operating at 383 nm has been designed, fabricated and characterized. Single mode operation was observed for a wide temperature range between 10 and 270 K. In order to avoid technologically difficult etching of ZnO, a 3rd order diffraction grating was dry-etched into an additional 120 nm-thick Si3N4 layer deposited on the ZnO active region. The spectral linewidth of the laser emission was 0.4 nm, whereas an optical pump threshold intensity of 0.12 MW/cm2 and a peak output power of 14 mW were seen. The temperature tuning coefficient of the ZnO refractive index was determined from wavelength vs. temperature measurements; a value of 9 × 10-5 K-1 was found, in good agreement with literature values.

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