High performance micromachined Sm 2Co 17 polymer bonded magnets

Abstract A new technique has been developed to fabricate thick permanent magnets in large batches with a remanence of up to 0.34 T and an energy product of over 22 kJ/m 3 . To our knowledge, these are the best values reached in micromachined magnets. To illustrate the potential of this new technology, a new type of rotational speed microsensor has been fabricated. A 1 mVpp signal is obtained at 0.25 mm from a gearwheel.