Cascaded ring resonator-based temperature sensor with simultaneously enhanced sensitivity and range.

We report a cascaded ring resonator (CRR) based, silicon photonic temperature sensor for simultaneous sensitivity and range enhancement. To achieve the dual enhancement, the proposed CRR temperature sensor employs two micro ring resonators with different temperature sensitivities and different free spectral ranges (FSRs). The differences in the temperature sensitivities and FSRs are obtained by tailoring the in-plane geometric parameters of the two ring resonators. The CRR temperature sensor was fabricated by using a single-mask complementary metal-oxide-semiconductor (CMOS)-compatible process. The experimental results demonstrated a temperature sensitivity of 293.9 pm/°C, which was 6.3 times higher than that of an individual ring resonator. The sensor was also shown to enhance the temperature sensing range by 5.3 times.

[1]  Pieter Dumon,et al.  Finesse enhancement in silicon-on-insulator two-ring resonator system , 2008 .

[2]  Y. Vlasov,et al.  Losses in single-mode silicon-on-insulator strip waveguides and bends. , 2004, Optics express.

[3]  Daoxin Dai,et al.  Cascaded-Ring Optical Sensor With Enhanced Sensitivity by Using Suspended Si-Nanowires , 2011, IEEE Photonics Technology Letters.

[4]  Michal Lipson,et al.  Athermal silicon microring resonators with titanium oxide cladding. , 2013, Optics express.

[5]  Daoxin Dai,et al.  Highly sensitive digital optical sensor based on cascaded high-Q ring-resonators. , 2009, Optics express.

[6]  Qianfan Xu,et al.  Silicon microring resonators with 1.5-μm radius , 2008 .

[7]  Lin Zhang,et al.  In-fiber Bragg-grating temperature sensor system for medical applications , 1997 .

[8]  Jian-Jun He,et al.  Optical waveguide double-ring sensor using intensity interrogation with a low-cost broadband source. , 2011, Optics letters.

[9]  Ivo Rendina,et al.  Advance in thermo-optical switches: principles, materials, design, and device structure , 2011 .

[10]  Daoxin Dai,et al.  Suspended ultra-small disk resonator on silicon for optical sensing. , 2013, Optics letters.

[11]  W. Steier,et al.  Microring-resonator-based sensor measuring both the concentration and temperature of a solution. , 2008, Optics express.

[12]  P Waldron,et al.  A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides. , 2007, Optics express.

[13]  Jian-Jun He,et al.  Highly-sensitive silicon-on-insulator sensor based on two cascaded micro-ring resonators with vernier effect , 2011 .

[14]  Anna Gina Perri,et al.  Performance of SOI Bragg Grating Ring Resonator for Nonlinear Sensing Applications , 2014, Sensors.

[15]  C. E. Campanella,et al.  A high efficiency label-free photonic biosensor based on vertically stacked ring resonators , 2014 .

[16]  H. Toba,et al.  A wide-FSR waveguide double-ring resonator for optical FDM transmission systems , 1991 .

[17]  F. Xia,et al.  Group index and group velocity dispersion in silicon-on-insulator photonic wires. , 2006, Optics express.

[18]  A. Kersey,et al.  Fiber-optic Bragg-grating differential-temperature sensor , 1992, IEEE Photonics Technology Letters.

[19]  W. Bogaerts,et al.  Experimental characterization of a silicon photonic biosensor consisting of two cascaded ring resonators based on the Vernier-effect and introduction of a curve fitting method for an improved detection limit. , 2010, Optics express.

[20]  Miao Yu,et al.  Hybrid Miniature Fabry–Perot Sensor with Dual Optical Cavities for Simultaneous Pressure and Temperature Measurements , 2014, Journal of Lightwave Technology.

[21]  J. Michel,et al.  Athermal High-Index-Contrast Waveguide Design , 2008, IEEE Photonics Technology Letters.

[22]  H. Cai,et al.  Demonstration of a Photonic-Based Linear Temperature Sensor , 2015, IEEE Photonics Technology Letters.

[23]  Zeeshan Ahmed,et al.  On-chip silicon waveguide Bragg grating photonic temperature sensor. , 2015, Optics letters.

[24]  Paul Urquhart,et al.  Compound optical-fiber-based resonators , 1988 .

[25]  A. Gupta,et al.  On-fiber plasmonic interferometer for multi-parameter sensing. , 2015, Optics express.

[26]  Ivo Rendina,et al.  Temperature dependence of the thermo-optic coefficient in crystalline silicon between room temperature and 550 K at the wavelength of 1523 nm , 1999 .

[27]  Siva Yegnanarayanan,et al.  Toward ultimate miniaturization of high Q silicon traveling-wave microresonators. , 2010, Optics express.

[28]  Qianfan Xu,et al.  Silicon microring resonators with 1.5-microm radius. , 2008, Optics express.

[29]  P. Dumon,et al.  Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology , 2005, Journal of Lightwave Technology.

[30]  Vanessa Zamora,et al.  Investigation of cascaded SiN microring resonators at 1.3 µm and 1.5 µm. , 2013, Optics express.

[31]  Peng-Chun Peng,et al.  An SOI Michelson interferometer sensor with waveguide Bragg reflective gratings for temperature monitoring , 2001 .

[32]  M. Uenuma,et al.  Temperature-independent silicon waveguide optical filter. , 2009, Optics letters.

[33]  Wan-Gyu Lee,et al.  Silicon photonic temperature sensor employing a ring resonator manufactured using a standard CMOS process. , 2010, Optics express.

[34]  Mohammad Hafezi,et al.  Ultra-sensitive chip-based photonic temperature sensor using ring resonator structures. , 2014, Optics express.

[35]  P. Dumon,et al.  Silicon microring resonators , 2012 .