Lawrence Livermore National Laboratory ULTRA-350 Test Bed

LLNL has many in-house designed high precision machine tools. Some of these tools include the Large Optics Diamond Turning Machine (LODTM) [1], Diamond Turning Machine No.3 (DTM-3) and two Precision Engineering Research Lathes (PERL-1 and PERL-11). These machines have accuracy in the sub-micron range and in most cases position resolution in the couple of nanometers range. All of these machines are built with similar underlying technologies. The machines use capstan drive technology, laser interferometer position feedback, tachometer velocity feedback, permanent magnet (PM) brush motors and analog velocity and position loop servo compensation [2]. The machine controller does not perform any servo compensation it simply computes the differences between the commanded position and the actual position (the following error) and sends this to a D/A for the analog servo position loop. LLNL is designing a new high precision diamond turning machine. The machine is called the ULTRA 350 [3]. In contrast to many of the proven technologies discussed above, the plan for the new machine is to use brushless linear motors, high precision linear scales, machine controller motor commutation and digital servo compensation for the velocity and position loops. Although none of these technologies are new and have been in usemore » in industry, applications of these technologies to high precision diamond turning is limited. To minimize the risks of these technologies in the new machine design, LLNL has established a test bed to evaluate these technologies for application in high precision diamond turning. The test bed is primarily composed of commercially available components. This includes the slide with opposed hydrostatic bearings, the oil system, the brushless PM linear motor, the two-phase input three-phase output linear motor amplifier and the system controller. The linear scales are not yet commercially available but use a common electronic output format. As of this writing, the final verdict for the use of these technologies is still out but the first part of the work has been completed with promising results. The goal of this part of the work was to close a servo position loop around a slide incorporating these technologies and to measure the performance. This paper discusses the tests that were setup for system evaluation and the results of the measurements made. Some very promising results include; slide positioning to nanometer level and slow speed slide direction reversal at less than 100nm/min with no observed discontinuities. This is very important for machine contouring in diamond turning. As a point of reference, at 100 nm/min it would take the slide almost 7 years to complete the full designed travel of 350 mm. This speed has been demonstrated without the use of a velocity sensor. The velocity is derived from the position sensor. With what has been learned on the test bed, the paper finishes with a brief comparison of the old and new technologies. The emphasis of this comparison will be on the servo performance as illustrated with bode plot diagrams.« less