Experiment on Vertical Active Vibration-isolating System for Ultra-precision Machine Tool

s:An anlysis is made on the theories of active and passive vibration isolation and a vertical active vibrations isolating system is established for ultra precision machine tool. The experiment shows that, by introduction of the active control, the effect of vibration isolator isolating from main vibration of environment interference and low frequency vibration of the isolator are improved to a certain extent. The effective vibration isolating range is 3 to 5Hz. The roughness of workpiece is also improved.