Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source

Atomic processes in Sn plasmas are investigated for application to extreme-ultraviolet (EUV) light sources used in microlithography. We develop a full collisional radiative (CR) model of Sn plasmas based on calculated atomic data using Hebrew University Lawrence Livermore Atomic Code (HULLAC). Resonance and satellite lines from singly and multiply excited states of Sn ions, which contribute significantly to the EUV emission, are identified and included in the model through a systematic investigation of their effect on the emission spectra. The wavelengths of the 4d−4f+4p−4d transitions of Sn5+ to Sn13+ are investigated, because of their importance for determining the conversion efficiency of the EUV source, in conjunction with the effect of configuration interaction in the calculation of atomic structure. Calculated emission spectra are compared with those of charge exchange spectroscopy and of laser produced plasma EUV sources. The comparison is also carried out for the opacity of a radiatively heated Sn...

[1]  M. Klapisch,et al.  HULLAC, an integrated computer package for atomic processes in plasmas , 2001 .

[2]  I. Fomenkov,et al.  Extreme ultraviolet emission spectra of highly ionized xenon and their comparison with model calculations , 2004 .

[3]  H. Nishimura,et al.  EUV emission spectra in collisions of multiply charged Sn ions with He and Xe , 2010 .

[4]  Hiroki Tanaka,et al.  Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas , 2005 .

[5]  Hiroyuki Furukawa,et al.  Estimation of emission efficiency for laser-produced EUV plasmas , 2004, SPIE Advanced Lithography.

[6]  Yuri Ralchenko,et al.  Review of the 9th NLTE code comparison workshop. , 2007, High energy density physics.

[7]  F de Gaufridy de Dortan,et al.  Influence of configuration interaction on satellite lines of xenon and tin in the EUV region , 2007 .

[8]  Hiroaki Nishimura,et al.  Charge exchange spectroscopy in Snq+(q = 6-15)-He collisions , 2007 .

[9]  A. Cummings,et al.  Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment , 2005 .

[10]  M. Klapisch,et al.  Variance of the distributions of energy levels and of the transition arrays in atomic spectra. III. Case of spin-orbit-split arrays. , 1979, Physical review. A, General physics.

[11]  Yabe,et al.  Collisional-radiative and average-ion hybrid models for atomic processes in high-Z plasmas. , 1987, Physical review. A, General physics.

[12]  A. Cummings,et al.  13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources , 2006 .

[13]  S S Churilov,et al.  Analyses of the Sn IX–Sn XII spectra in the EUV region , 2006 .

[14]  T. Abe,et al.  Laser-produced plasma source development for EUV lithography , 2009, 2009 IEEE International Conference on Plasma Science - Abstracts.

[15]  Hiroyuki Furukawa,et al.  Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithographya) , 2008 .

[16]  M. Busquet.  Radiation-dependent ionization model for laser-created plasmas , 1993 .

[17]  V. B. Uvarov,et al.  Quantum-Statistical Models of Hot Dense Matter , 2005 .

[18]  Vivek Bakshi,et al.  EUV Sources for Lithography , 2006 .

[19]  C. Bowen.  NLTE emissivities via an ionisation temperature , 2001 .

[20]  Gerry O'Sullivan,et al.  4d–4f emission resonances in laser-produced plasmas , 1981 .

[21]  Hiroyuki Furukawa,et al.  Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas , 2004 .

[22]  Padraig Dunne,et al.  Optimizing 13.5nm laser-produced tin plasma emission as a function of laser wavelength , 2007 .

[23]  Kunioki Mima,et al.  Low-density tin targets for efficient extreme ultraviolet light emission from laser-produced plasmas , 2006 .

[24]  Takeshi Higashiguchi,et al.  Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2)nanoparticles , 2006 .

[25]  Luke McKinney,et al.  Variable composition laser-produced Sn plasmas—a study of their time-independent ion distributions , 2004 .

[26]  K. Nishihara,et al.  Complementary spectroscopy of tin ions using ion and electron beams , 2009 .

[27]  Mark S. Tillack,et al.  Efficient 13.5nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse , 2008 .

[28]  Svendsen,et al.  Statistics and characteristics of xuv transition arrays from laser-produced plasmas of the elements tin through iodine. , 1994, Physical review. A, Atomic, molecular, and optical physics.

[29]  Chihiro Suzuki,et al.  Transitions and the effects of configuration interaction in the spectra of Sn XV –Sn XVIII , 2009 .

[30]  A. Cummings,et al.  Conversion efficiency of a laser-produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody , 2005 .

[31]  Kunioki Mima,et al.  Opacity effect on extreme ultraviolet radiation from laser-produced tin plasmas. , 2005, Physical review letters.

[32]  Y. Zel’dovich,et al.  Gas Dynamics. (Book Reviews: Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena. Vol. 1) , 1970 .

[33]  Franck Gilleron,et al.  Modeling of EUV emission from xenon and tin plasma sources for nanolithography , 2006 .

[34]  J. Meyer-ter-Vehn,et al.  Thermal X-Ray Emission from Ion-Beam-Heated Matter , 1990 .

[35]  K. Nishihara,et al.  EUV emission spectra from excited multiply charged xenon ions produced in charge-transfer collisions , 2005 .

[36]  A. Cummings,et al.  Simplified calculation of nonlocal thermodynamic equilibrium excited state populations contributing to 13.5nm emission in a tin plasma , 2007 .

[37]  Georg Soumagne,et al.  Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target , 2007 .