Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma

A plasma diagnostic study of the Ion Energy Distribution Functions (IEDFs) of H+, H2+, and H3+ ions in a 2.45 GHz hydrogen plasma reactor called TIPS is presented. The measurements are conducted by using a Plasma Ion Mass Spectrometer with an energy sector and a quadrupole detector from HIDEN Analytical Limited in order to select an ion species and to measure its energy distribution. The reactor is operated in the pulsed mode at 100 Hz with a duty cycle of 10% (1 ms pulse width). The IEDFs of H+, H2+, and H3+ are obtained each 5 μs with 1 μs time resolution throughout the entire pulse. The temporal evolution of the plasma potential and ion temperature of H+ is derived from the data. It is shown that the plasma potential is within the range of 15–20 V, while the ion temperature reaches values of 0.25–1 eV during the pulse and exhibits a fast transient peak when the microwave radiation is switched off. Finally, the ion temperatures are used to predict the transverse thermal emittance of a proton beam extrac...

[1]  O. Cortázar,et al.  Strongly Eccentric Rotational Plasma Lamina Observed in a 2.45-GHz Hydrogen Discharge , 2016, IEEE Transactions on Plasma Science.

[2]  O. Cortázar,et al.  Time evolution of the electron energy distribution function in pulsed microwave magnetoplasma in H2 , 2016 .

[3]  O. Cortázar,et al.  Correlations between density distributions, optical spectra, and ion species in a hydrogen plasma (invited). , 2016, The Review of scientific instruments.

[4]  O. Cortázar,et al.  The relationship between visible light emission and species fraction of the hydrogen ion beams extracted from 2.45 GHz microwave discharge. , 2015, The Review of scientific instruments.

[5]  O. Cortázar,et al.  Plasma distributions observed in a 2.45 GHz hydrogen discharge , 2014 .

[6]  O. Cortázar,et al.  Influence of microwave driver coupling design on plasma density at Testbench for Ion sources Plasma Studies, a 2.45 GHz electron cyclotron resonance plasma reactor. , 2014, The Review of scientific instruments.

[7]  Tao Zhang,et al.  High current H2(+) and H3(+) beam generation by pulsed 2.45 GHz electron cyclotron resonance ion source. , 2014, The Review of scientific instruments.

[8]  J. Komppula,et al.  Double einzel lens extraction for the JYFL 14 GHz ECR ion source designed with IBSimu , 2013 .

[9]  B. Ludewigt,et al.  Measurements of beam current density and proton fraction of a permanent-magnet microwave ion source. , 2011, The Review of scientific instruments.

[10]  L Celona,et al.  Review on high current 2.45 GHz electron cyclotron resonance sources (invited). , 2010, The Review of scientific instruments.

[11]  D. Mascali,et al.  Microwave to plasma coupling in electron cyclotron resonance and microwave ion sources (invited). , 2010, The Review of scientific instruments.

[12]  T. Ropponen,et al.  The role of seed electrons on the plasma breakdown and preglow of electron cyclotron resonance ion source. , 2010, The Review of scientific instruments.

[13]  Z. Guo,et al.  Study on proton fraction of beams extracted from electron cyclotron resonance ion source. , 2008, The Review of scientific instruments.

[14]  I. Brown.  The Physics and Technology of Ion Sources: BROWN:ION SOURCES 2ED O-BK , 2004 .

[15]  R. Ferdinand,et al.  Status of the Trasco Intense Proton Source and emittance measurements , 2004 .

[16]  S. Bogomolov,et al.  The 2.45 GHz ECR ion source for the first stage of the DRIBs project , 2003 .

[17]  M. Wertheimer,et al.  Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma , 2000 .

[18]  Santo Gammino,et al.  Emittance improvement of the electron cyclotron resonance high intensity light ion source proton beam by gas injection in the low energy beam transport , 2000 .

[19]  M. Hoff,et al.  Design of a 2.45 GHz ECR Ion Source for Production of Medium Charge States Ions , 1997 .

[20]  H. Winter,et al.  Development of a compact 2.45 GHz ECR ion source , 1992 .

[21]  Ian G. Brown,et al.  The Physics and technology of ion sources , 1989 .