Compliant grinding and polishing: A review

Abstract Compliant grinding and polishing refers to a class of fine material processing methods relying on one or more system element being compliant with the workpiece surface in a controllable and reversible manner, thus being distinct from conventional rigid wheel grinding and polishing. The resulting surface adaptability greatly facilitates the ultra-precision machining of freeform surfaces, with a level of accuracy and productivity difficult to achieve with conventional rigid processing systems. Aiming for a comprehensive review of signal advances on this topic in the last decades, this paper introduces a multi-level compliance categorization system to sort between distinctive processes. For each category, various perspectives are explored that pertain to principles, methodologies, and physical properties such as material removal and surface integrity. Finally, relative merits are analyzed, together with a discussion of the outlook and future trends.

[1]  Xiaojun Lin,et al.  Five-axis abrasive belt flap wheel polishing method for leading and trailing edges of aero-engine blade , 2017 .

[2]  Wu-Le Zhu,et al.  Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning , 2016 .

[3]  H. Harry Asada,et al.  Optimal compliance design for grinding robot tool holders , 1985, Proceedings. 1985 IEEE International Conference on Robotics and Automation.

[4]  Ekkard Brinksmeier,et al.  Ultra-precision grinding , 2010 .

[5]  Ming-June Tsai,et al.  Efficient automatic polishing process with a new compliant abrasive tool , 2006 .

[6]  Xiao Luo,et al.  Hydraulic supports for polishing TMT M3MP , 2016, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[7]  Heejoo Choi,et al.  RIFTA: A Robust Iterative Fourier Transform-based dwell time Algorithm for ultra-precision ion beam figuring of synchrotron mirrors , 2020, Scientific Reports.

[8]  R. Anderson,et al.  Surface Finishing Using Soft Abrasives , 1983 .

[9]  Michael Zeuner,et al.  Ion-beam figuring of x-ray mirrors , 2019, Optical Engineering + Applications.

[10]  Sang Jo Lee,et al.  Magnetorheological finishing process for hard materials using sintered iron-CNT compound abrasives , 2009 .

[11]  Ji Zhao,et al.  Investigation into electrorheological fluid-assisted polishing , 2005 .

[12]  Tsunemoto Kuriyagawa,et al.  Electrorheological fluid-assisted ultra-precision polishing for small three-dimensional parts , 2002 .

[13]  Yoshiharu Namba,et al.  Super-smooth finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing , 2013 .

[14]  M. Tricard,et al.  Innovations in Abrasive Products for Precision Grinding , 2004 .

[15]  Yinbiao Guo,et al.  Improved analysis model for material removal mechanisms of bonnet polishing incorporating the pad wear effect. , 2018, Applied optics.

[16]  Ri Pan,et al.  Modification of tool influence function of bonnet polishing based on interfacial friction coefficient , 2018 .

[17]  Tudor Deaconescu,et al.  Developing an Analytical Model and Computing Tool for Optimizing Lapping Operations of Flat Objects Made of Alloyed Steels , 2020, Materials.

[18]  Pilseong Kang,et al.  New Bending System Using a Segmented Vacuum Chuck for Stressed Mirror Polishing of Thin Mirrors , 2017 .

[19]  Yoshiharu Namba,et al.  Ultra-Precision Float Polishing of Calcium Fluoride Single Crystals for Deep Ultra Violet Applications , 2004 .

[20]  Haobo Cheng,et al.  Study of a wheel-like electrorheological finishing tool and its applications to small parts. , 2016, Applied optics.

[21]  Peter Krajnik,et al.  High-performance grinding—A review , 2006 .

[22]  Yan Qiusheng,et al.  Surface and subsurface cracks characteristics of single crystal SiC wafer in surface machining , 2015 .

[23]  Yu He,et al.  Development of a Novel 2-D Vibration-Assisted Compliant Cutting System for Surface Texturing , 2017, IEEE/ASME Transactions on Mechatronics.

[24]  Bernd Kuhlenkötter,et al.  Real-time simulation and visualization of robotic belt grinding processes , 2008 .

[25]  Haobo Cheng,et al.  Design of integrated-electrode tool for electrorheological finishing of optical glasses , 2011 .

[26]  J. Yuan,et al.  Shear-thickening polishing method , 2015 .

[27]  Fengzhou Fang,et al.  Manufacturing and measurement of freeform optics , 2013 .

[28]  Chris Maloney,et al.  Improving low, mid and high-spatial frequency errors on advanced aspherical and freeform optics with MRF , 2016, Precision Optics Manufacturing.

[29]  Li Da Zhu,et al.  Evaluation of grinding-induced subsurface damage in optical glass BK7 , 2016 .

[30]  Anthony Beaucamp,et al.  Manufacture of aspherical molding dies for x-ray telescopes after ASTRO-H , 2014, Astronomical Telescopes and Instrumentation.

[31]  Zhaowei Zhong,et al.  Recent Advances in Polishing of Advanced Materials , 2008 .

[32]  Tsunemoto Kuriyagawa,et al.  Development of Electrorheological Fluid Assisted Machining for 3-Dimensional Small Parts. , 1999 .

[33]  Thomas G. Bifano,et al.  Precision Grinding of Ultra-Thin Quartz Wafers , 1993 .

[34]  G. McCavana,et al.  New developments in the precessions process for manufacturing free-form, large-optical, and precision-mechanical surfaces , 2006, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[35]  Yaoyao Shi,et al.  Parameter optimization of five-axis polishing using abrasive belt flap wheel for blisk blade , 2017 .

[36]  Tom L. Zobrist,et al.  Fabrication and testing of the first 8.4-m off-axis segment for the Giant Magellan Telescope , 2010, Astronomical Telescopes + Instrumentation.

[37]  Wook-Bae Kim,et al.  The electromechanical principle of electrorheological fluid-assisted polishing , 2003 .

[38]  V. Sooraj,et al.  Fine finishing of internal surfaces using elastic abrasives , 2014 .

[39]  Vijay K. Jain,et al.  Magnetic field assisted abrasive based micro-/nano-finishing , 2009 .

[40]  Carlos Perez-Vidal,et al.  Adaptive Sliding Mode Control for Robotic Surface Treatment Using Force Feedback , 2018, Mechatronics.

[41]  L. Blunt,et al.  An experimental study on the correlation of polishing force and material removal for bonnet polishing of cobalt chrome alloy , 2014 .

[42]  Ruxu Du,et al.  A New Design of Flexible Constant Force Grinding Head and Experimental Verification , 2018, 2018 IEEE International Conference on Information and Automation (ICIA).

[43]  Marcel Horák,et al.  Abrasive cylindrical brush behaviour in surface processing , 2017 .

[44]  Hsien-I Lin,et al.  Design of an Adaptive Force Controlled Robotic Polishing System Using Adaptive Fuzzy-PID , 2018, IAS.

[45]  D. R. Baselt,et al.  Float-polishing process and analysis of float-polished quartz. , 1994, Applied optics.

[46]  P. Bandyopadhyay,et al.  Review of several precision finishing processes for optics manufacturing , 2018, Journal of Micromanufacturing.

[47]  Guoyu Yu,et al.  Study of footprint variations of CCP considering machine kinematics , 2019, EPJ Web of Conferences.

[48]  Guoqin Huang,et al.  Modeling and simulation of the distribution of undeformed chip thicknesses in surface grinding , 2018 .

[49]  Stefan Sinzinger,et al.  A Study on Elastic Grinding Tools , 2014 .

[50]  Yasuhiro Kakinuma,et al.  Basic Study on Ductile-Mode Grinding of Optical Glass Lenses with Rubber Bonded Diamond Wheels , 2016 .

[51]  Shaohui Yin,et al.  Ultraprecision finishing process integrated ELID grinding and MRF for BK glass , 2009, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[52]  Tapio K. Korhonen,et al.  Computer-controlled figuring method for thin and flexible mirrors , 1994, Astronomical Telescopes and Instrumentation.

[53]  Tomonari Furukawa,et al.  Automated polishing of an unknown three-dimensional surface , 1996 .

[54]  Dragos Axinte,et al.  Time-dependent manufacturing processes lead to a new class of inverse problems , 2019, Proceedings of the National Academy of Sciences.

[55]  Abhijit Chandra,et al.  A plasticity-based model of material removal in chemical-mechanical polishing (CMP) , 2001 .

[56]  Yinbiao Guo,et al.  Modeling of the static tool influence function of bonnet polishing based on FEA , 2014 .

[57]  Kunio Shimada,et al.  Characteristics of magnetic compound fluid (MCF) in a rotating rheometer , 2002 .

[58]  Yoshiharu Namba,et al.  Shape adaptive grinding of CVD silicon carbide , 2014 .

[59]  E. Hugot,et al.  Thin Shell Active Polishing for Large Deformable Secondary Mirrors , 2007 .

[60]  Y. Matsuo,et al.  A new float-polishing technique with large clearance utilising magnetic compound fluid , 2008 .

[61]  Wenhan Jiang,et al.  Study of PZT actuated deformable aspheric polishing lap , 2009, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[62]  Chi Fai Cheung,et al.  Theoretical and experimental investigation of surface generation in swing precess bonnet polishing of complex three-dimensional structured surfaces , 2017 .

[63]  Yaoyao Shi,et al.  An adaptive flexible polishing path programming method of the blisk blade using elastic grinding tools , 2019, Journal of Mechanical Science and Technology.

[64]  T. Ishikawa,et al.  Focusing of X-ray free-electron laser pulses with reflective optics , 2012, Nature Photonics.

[65]  John Corbett,et al.  Ultra-precision grinding of PZT ceramics—Surface integrity control and tooling design , 2009 .

[66]  V. Jain,et al.  Design and development of the magnetorheological abrasive flow finishing (MRAFF) process , 2004 .

[67]  Luis Basañez,et al.  Robotic polishing systems , 2005, IEEE Robotics & Automation Magazine.

[68]  M. Ferrari,et al.  Active polishing of a 2mm thin shell for large adaptive secondary mirrors , 2006, SPIE Astronomical Telescopes + Instrumentation.

[69]  Sug-Whan Kim,et al.  The 'Precessions' tooling for polishing and figuring flat, spherical and aspheric surfaces. , 2003, Optics express.

[70]  Liam Blunt,et al.  The application of optics polishing to free form knee implants , 2006 .

[71]  Volha Shchetnikava,et al.  Dynamic Dilution Effect in Binary Blends of Linear Polymers with Well-Separated Molecular Weights , 2014 .

[72]  Ju Long Yuan,et al.  Review on the progress of ultra-precision machining technologies , 2017 .

[73]  Sung-San Cho,et al.  Curved surface finishing with flexible abrasive tool , 2002 .

[74]  Ajay Sidpara,et al.  High efficiency chemical assisted nanofinishing of HVOF sprayed WC-Co coating , 2018 .

[75]  Yasuhiro Tani,et al.  Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers , 2007 .

[76]  Ming J. Tsai,et al.  Development of an automatic mold polishing system , 2005, IEEE Trans Autom. Sci. Eng..

[77]  A. Beaucamp,et al.  Controlling of compliant grinding for low-rigidity components , 2020, International Journal of Machine Tools and Manufacture.

[78]  Jun Wang,et al.  Effect of liquid properties on the stability of an abrasive waterjet , 2008 .

[79]  Wu-Le Zhu,et al.  Investigation of critical material removal transitions in compliant machining of brittle ceramics , 2020 .

[80]  Chi Fai Cheung,et al.  Modelling and simulation of structure surface generation using computer controlled ultra-precision polishing , 2011 .

[81]  Ying Zhang,et al.  Mechanism and Parameter Optimization in Grinding and Polishing of M300 Steel by an Elastic Abrasive , 2019, Materials.

[82]  Yaser Mohammadi,et al.  Optimization of material removal rate in milling of thin-walled structures using penalty cost function , 2019, International Journal of Machine Tools and Manufacture.

[83]  S. Kalpakjian,et al.  Magnetic fluid grinding: a new technique for finishing advanced ceramics , 1994 .

[84]  Chris Supranowitz,et al.  Field proven technologies for fabrication of high-precision aspheric and freeform optical surfaces , 2015, Other Conferences.

[85]  Y. Mori,et al.  Elastic Emission Machining , 1987 .

[86]  Hang Gao,et al.  Damage mechanisms during lapping and mechanical polishing CdZnTe wafers , 2010 .

[87]  Anthony Beaucamp,et al.  Theoretical and experimental investigation of material removal mechanism in compliant shape adaptive grinding process , 2019, International Journal of Machine Tools and Manufacture.

[88]  G. Lemaître New procedure for making schmidt corrector plates. , 1972, Applied optics.

[89]  Anthony Beaucamp,et al.  Centrifugal and hydroplaning phenomena in high-speed polishing , 2019, CIRP Annals.

[90]  Xipeng Xu,et al.  Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP , 2018 .

[91]  Hon-Yuen Tam,et al.  To speed up robotic mold polishing by hard tools , 1996, Proceedings of the IEEE International Conference on Industrial Technology (ICIT'96).

[92]  Bi Zhang,et al.  The effect of machine stiffness on grinding of silicon nitride , 1999 .

[93]  K. Ramesh,et al.  Aero-lap polishing of poly crystalline diamond inserts using Multicon media , 2012 .

[94]  James H. Burge,et al.  Development of optimal grinding and polishing tools for aspheric surfaces , 2001, Optics + Photonics.

[95]  Hidekazu Mimura,et al.  Preparation of ultrasmooth and defect-free 4H-SiC(0001) surfaces by elastic emission machining , 2005 .

[96]  Yoshiharu Namba,et al.  Corrective finishing of extreme ultraviolet photomask blanks by precessed bonnet polisher. , 2014, Applied optics.

[97]  Roger M. Wood,et al.  Laser-induced damage of optical materials , 2003 .

[98]  A. J. Gámez,et al.  Thin-Wall Machining of Light Alloys: A Review of Models and Industrial Approaches , 2019, Materials.

[99]  N. Gindy,et al.  Investigations on belt polishing of heat-resistant titanium alloys , 2005 .

[100]  Biing-Hwa Yan,et al.  A study on the application of newly developed magneto-elastic abrasive to improving the surface roughness of the bore , 2014 .

[101]  Tan Jin,et al.  Modeling and prediction of surface topography and surface roughness in dual-axis wheel polishing of optical glass , 2019, International Journal of Machine Tools and Manufacture.

[102]  Lin Chen,et al.  Contact force control and vibration suppression in robotic polishing with a smart end effector , 2019, Robotics and Computer-Integrated Manufacturing.

[103]  R. Sabia,et al.  The effect of abrasive hardness on the chemical-assisted polishing of (0001) plane sapphire , 2005 .

[104]  Ning Ling,et al.  Novel method of designing deformable polishing lap , 2007, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[105]  Kunio Shimada,et al.  The effects of polishing with magnetic compound fluid , 2002 .

[106]  Martin Weiser,et al.  Ion beam figuring for lithography optics , 2009 .

[107]  Wei Zhu,et al.  Design and analysis of a compliant polishing manipulator with tensegrity-based parallel mechanism , 2019, Australian Journal of Mechanical Engineering.

[108]  Leopold Claremont The Gem-cutter's Craft , 2012 .

[109]  Yoshiharu Namba,et al.  Process mechanism in shape adaptive grinding (SAG) , 2015 .

[110]  Ajay Sidpara,et al.  Magnetorheological finishing: a perfect solution to nanofinishing requirements , 2014 .

[111]  Shuh-Yi Wang,et al.  Investigation of elastic emission machining process: lubrication effects , 1995 .

[112]  Ajay Sidpara,et al.  An investigation into the wear mechanism of zirconia-alumina polishing pad under different environments in shape adaptive grinding of WC-Co coating , 2019, Wear.

[113]  V. S. Sooraj,et al.  A study on fine finishing of hard workpiece surfaces using fluidized elastic abrasives , 2014 .

[114]  Dae Wook Kim,et al.  Rigid conformal polishing tool using non-linear visco-elastic effect. , 2010, Optics express.

[115]  Y. Higashi,et al.  New machining method for making precise and very smooth mirror surfaces made from Cu and Al alloys for synchrotron radiation optics , 1989 .

[116]  C. Fred Higgs,et al.  Hydrodynamics of Slurry Flow in Chemical Mechanical Polishing A Review , 2006 .

[117]  Ju Long Yuan,et al.  Spinning- Inflated-Ballonet Polishing Tool and its Application in Curved Surface Polishing , 2007 .

[118]  James H. Burge,et al.  Polishing of a 6.5-m f/1.25 mirror for the first Magellan telescope , 1999, Optical Systems Design.

[119]  Young-Sik Pyoun,et al.  Evaluation Tool Life and Cutting Characteristics of Carbide Hob TiAlN Coating Surface Polishing Using Aero Lap Polishing Technology and Multi-con , 2012 .

[120]  Ju Long Yuan,et al.  The Characteristic of Organic Bond Grinding Wheel , 2007 .

[121]  Anthony Beaucamp,et al.  Development of hybrid fluid jet/float polishing process , 2013, Optics & Photonics - Optical Engineering + Applications.

[122]  David Dornfeld,et al.  Material removal mechanism in chemical mechanical polishing: theory and modeling , 2001 .

[123]  Dragos Axinte,et al.  Textured grinding wheels: A review , 2016 .

[124]  Y. Namba,et al.  Ultrafine Finishing of Ceramics and Metals by Float Polishing , 1981 .

[125]  Y. Yeung,et al.  Modelling of Processing Velocity in Computer-controlled Sub-aperture Pad Manufacturing , 2008 .

[126]  A. Beaucamp,et al.  Brittle-ductile transition in shape adaptive grinding (SAG) of SiC aspheric optics , 2017 .

[127]  Barbara Linke,et al.  Review on Grinding Tool Wear With Regard to Sustainability , 2015 .

[128]  S. Roberts,et al.  Polishing Behavior and Surface Quality of Alumina and Alumina/Silicon Carbide Nanocomposites , 2004 .

[129]  Fengfeng Xi,et al.  Modeling and control of automated polishing/deburring process using a dual-purpose compliant toolhead , 2008 .

[130]  Steve C. West Development and Results for Stressed-lap Polishing of Large Telescope Mirrors , 2014 .

[131]  Ming Jiang,et al.  Application of Taguchi method for optimization of finishing conditions in magnetic float polishing (MFP) , 1997 .

[132]  Kazem Kazerounian,et al.  A simulation platform for optimal selection of robotic belt grinding system parameters , 2013 .

[133]  Feihu Zhang,et al.  Study on optical polishing of optical glass by means of ultrasonic-magnetorheological compound finishing , 2007, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[134]  Paul Shore,et al.  Manufacture of segments for extremely large telescopes: a new perspective , 2004, Extremely Large Telescopes.

[135]  Dragos Axinte,et al.  State-of-the-art of surface integrity in machining of metal matrix composites , 2019, International Journal of Machine Tools and Manufacture.

[136]  R. Komanduri,et al.  Chemical Mechanical Polishing (CMP) in Magnetic Float Polishing (MFP) of Advanced Ceramic (Silicon Nitride) and Glass (Silicon Dioxide) , 2001 .

[137]  Ju Long Yuan,et al.  Evolution and equivalent control law of surface roughness in shear-thickening polishing , 2016 .

[138]  Anthony Beaucamp,et al.  Ultra-precision finishing of low expansion ceramics by compliant abrasive technologies: A comparative study , 2019, Ceramics International.

[139]  Jianmeng Huang,et al.  Contact Deformation Behavior of an Elastic Silicone/SiC Abrasive in Grinding and Polishing , 2018, Strength of Materials.

[140]  William Kordonski,et al.  Fundamentals of Magnetorheological Fluid Utilization in High Precision Finishing , 1999 .

[141]  Kenta Seki,et al.  High precision force control of pneumatic cylinders considering disturbance suppression with specific frequency , 2011, 2011 IEEE International Conference on Mechatronics.

[142]  Anant Kumar Singh,et al.  A novel magnetorheological gear profile finishing with high shape accuracy , 2019, International Journal of Machine Tools and Manufacture.

[143]  Yoshimi Takeuchi,et al.  Dexterous polishing of overhanging sculptured surfaces with a 6-axis control robot , 1995, Proceedings of 1995 IEEE International Conference on Robotics and Automation.

[144]  Ji Zhao,et al.  Analytical model of dynamic and overlapped footprints in abrasive air jet polishing of optical glass , 2019, International Journal of Machine Tools and Manufacture.

[145]  Francisco J. Galindo-Rosales,et al.  An apparent viscosity function for shear thickening fluids , 2011 .

[146]  Guijian Xiao,et al.  Constant-load adaptive belt polishing of the weak-rigidity blisk blade , 2015 .

[147]  Andreas Tünnermann,et al.  Fabrication of metal mirror modules for snap-together VIS telescopes , 2015, SPIE Optifab.

[148]  Y. Namba,et al.  ATOMIC SURFACE ROUGHNESS , 1998 .

[149]  Hendrik Van Brussel,et al.  Compliant Robot Motion I. A Formalism for Specifying Compliant Motion Tasks , 1988, Int. J. Robotics Res..

[150]  Danwei Wang,et al.  Design of a force-controlled end-effector with low-inertia effect for robotic polishing using macro-mini robot approach , 2018 .

[151]  Nobuo Yasunaga,et al.  Mechanochemical Polishing of Si Single Crystals with Soft Powders , 1978 .

[152]  C. Cheung,et al.  A theoretical and experimental investigation of material removal characteristics and surface generation in bonnet polishing , 2016 .

[153]  Jianyong Li,et al.  Investigation on wear modes and mechanisms of abrasive belts in grinding of U71Mn steel , 2018, The International Journal of Advanced Manufacturing Technology.

[154]  Anthony Beaucamp,et al.  A novel ultrasonic cavitation assisted fluid jet polishing system , 2017 .

[155]  Peng Zhang,et al.  Mid-spatial frequency removal on aluminum free-form mirror. , 2019, Optics express.

[156]  E. Hugot,et al.  Stress polishing of thin shells for adaptive secondary mirrors. Application to the Very Large Telescope deformable secondary , 2011 .

[157]  D. Golini,et al.  Progress Update in Magnetorheological Finishing , 1999 .

[158]  Li Ying,et al.  New design deforming controlling system of the active stressed lap , 2008, Astronomical Telescopes + Instrumentation.

[159]  Ekkard Brinksmeier,et al.  Manufacturing of advanced smart tooling for metal forming , 2019, CIRP Annals.

[160]  William Kordonski,et al.  Magnetorheological finishing (MRF) in commercial precision optics manufacturing , 1999, Optics + Photonics.

[161]  William Kordonski,et al.  Magnetorheological Jet Finishing of Conformal, Freeform and Steep Concave Optics , 2006 .

[162]  M. Manfra,et al.  Hydroplane polishing of semiconductor crystals , 1981 .

[163]  Jessica E. DeGroote,et al.  Polishing PMMA and other optical polymers with magnetorheological finishing , 2003, SPIE Optics + Photonics.

[164]  Anthony Beaucamp,et al.  Non-Newtonian fluid based contactless sub-aperture polishing , 2020 .

[165]  Xiao Luo,et al.  Fabrication of large off-axis asymmetry aspherics using stressed lap with orbital tool motion , 2010, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[166]  Yoshiharu Namba,et al.  Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid bonded diamond wheels , 1999 .

[167]  Liang Dong,et al.  Effect of Wheel Elasticity on Grinding Stability , 2010 .

[168]  Dahu Zhu,et al.  An improved chip-thickness model for surface roughness prediction in robotic belt grinding considering the elastic state at contact wheel-workpiece interface , 2019, The International Journal of Advanced Manufacturing Technology.

[169]  J. Bennett,et al.  Float polishing of optical materials. , 1987, Applied optics.

[170]  Xipeng Xu,et al.  Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing , 2016 .

[171]  Li Da Zhu,et al.  Analytical modeling of ground surface topography in monocrystalline silicon grinding considering the ductile-regime effect , 2017 .

[172]  Henry W. Gutsche Polishing of Sapphire with Colloidal Silica , 1978 .

[173]  Pulak M. Pandey,et al.  Mechanism of material removal in ball end magnetorheological finishing process , 2013 .

[174]  Fritz Klocke,et al.  Dynamic jamming in dense suspensions: Surface finishing and edge honing applications , 2017 .

[175]  Shuh-Yi Wang,et al.  On machining rate of hydrodynamic polishing process , 1995 .

[176]  康司 加藤,et al.  磁性流体研摩の研究 : 第1報,球研摩における浮子の効果 , 1988 .

[177]  S. R. Billingsley,et al.  Grinding induced subsurface cracks in silicon wafers , 1999 .

[178]  Anthony Beaucamp,et al.  1010 Shape Adaptive Grinding (SAG) : a new Process for Finishing of Ceramics and High-performance Alloys , 2015 .

[179]  R H Nagel,et al.  Practical design and performance of the stressed-lap polishing tool. , 1994, Applied optics.

[180]  Jianyong Li,et al.  An online belt wear monitoring method for abrasive belt grinding under varying grinding parameters , 2020 .

[181]  Eric D. Wetzel,et al.  The ballistic impact characteristics of Kevlar® woven fabrics impregnated with a colloidal shear thickening fluid , 2003 .

[182]  Jeong-Du Kim,et al.  Study on magnetic polishing of free-form surfaces , 1997 .

[183]  Ekkard Brinksmeier,et al.  Advances in Modeling and Simulation of Grinding Processes , 2006 .

[184]  Jan K. Spelt,et al.  Aerodynamic focusing of an abrasive air jet and its effect on machining resolution , 2019, International Journal of Machine Tools and Manufacture.

[185]  Kozo Ono,et al.  Force controlled robot for grinding , 1990, EEE International Workshop on Intelligent Robots and Systems, Towards a New Frontier of Applications.

[186]  Yu. V. Dimov,et al.  Machining Forces Exerted by an Elastic Abrasive Wheel , 2018 .

[187]  Wang Jing,et al.  Active control of low-frequency vibrations in ultra-precision machining with blended infinite and zero stiffness , 2019, International Journal of Machine Tools and Manufacture.

[188]  Xinnan Li,et al.  Active polishing technology for large aperture aspherical mirror and ultra thin mirror , 2006, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[189]  Selim Gürgen,et al.  Polishing operation of a steel bar in a shear thickening fluid medium , 2019, Composites Part B: Engineering.